Relative spectral responsivity calibration technology of InGaAs photodetector based on super-continuum light source

The InGaAs photodetector is one of the important optical detection devices in the near-infrared band. It has the characteristics of high quantum efficiency, low dark current and wide bandwidth. It is widely used in photoelectric measurement, optical communication, remote sensing and other fields. Based on the spectral comparison device of super-continuum white laser and double monochromator, a standard InGaAs trap detector was used to calibrate the relative spectral responsivity of a planar InGaAs detector in the 900 nm~1600 nm band. The responsivity calibration results of the two light sources were compared. The maximum relative difference of the spectral responsivity in the 900 nm~1600 nm band under the two light source conditions was less than 0.2%, which achieved good consistency. The measurement repeatability of the super-continuum light source is less than 0.06%. It was much smaller than the measurement repeatability of 1% using the halogen lamp, which reduced the uncertainty component contributed by the measurement repeatability. The feasibility of the super-continuum laser in the calibration of the relative spectral responsivity of the detector was verified. In addition, the measurement uncertainty of the spectral responsivity results of the calibrated planar detector was analyzed.