Correlation analysis of gray scale and geometric features of femtosecond laser spot

WANG Fubin; SUN Zhilin; WANG Shangzheng

doi:10.5768/JAO202041.0507002

Journal of Applied Optics > 2020 > 41(5): 1108-1116. > DOI: 10.5768/JAO202041.0507002

WANG Fubin, SUN Zhilin, WANG Shangzheng. Correlation analysis of gray scale and geometric features of femtosecond laser spot[J]. Journal of Applied Optics, 2020, 41(5): 1108-1116. DOI: 10.5768/JAO202041.0507002

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Correlation analysis of gray scale and geometric features of femtosecond laser spot

School of Electrical Engineering, North China University of Science and Technology, Tangshan 063210, China

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Received Date: January 13, 2020
Revised Date: March 05, 2020
Available Online: September 07, 2020

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Abstract

Abstract

During the processing of femtosecond laser ablation of monocrystalline silicon, the effective gray area in the spot image collected by the charge coupled-device (CCD) camera was difficult to distinguish with the background. In order to solve this problem, a method combining the principal component analysis with the adaptive histogram equalization of limited contrast was proposed to enhance the spot image, and then a detrending cross-correlation analysis method was proposed, which analyzed the long-range correlation of gray features and geometric features for the spot sequence images. The results show that the gray features of the spot sequence images have a strong long-range correlation with the spot texture contrast and the spot area, and they show a strong inverse correlation with the texture homogeneity. The correlation relationships are used to predict the gray features in the subsequent micro-groove processing.
- femtosecond laser,
- plasma spot,
- correlation analysis,
- spot gray

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References

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Correlation analysis of gray scale and geometric features of femtosecond laser spot