Distortion correction research by gravity for 300-mm-aperture flat based on multi-point adjustable support

WANG Yuntao; CHEN Lei; CHEN Jia; ZHANG Zhengyu; KONG Lu

doi:10.5768/JAO202041.0409801

Journal of Applied Optics > 2020 > 41(4): 801-809. > DOI: 10.5768/JAO202041.0409801

WANG Yuntao, CHEN Lei, CHEN Jia, ZHANG Zhengyu, KONG Lu. Distortion correction research by gravity for 300-mm-aperture flat based on multi-point adjustable support[J]. Journal of Applied Optics, 2020, 41(4): 801-809. DOI: 10.5768/JAO202041.0409801

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Distortion correction research by gravity for 300-mm-aperture flat based on multi-point adjustable support

School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

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Received Date: April 27, 2020
Revised Date: May 16, 2020
Available Online: June 09, 2020

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Abstract

Abstract

In the field of high-precision optical elements, especially the planar optical elements with large aperture, the deformation by gravity becomes an inevitable problem with the improvement of requirements for higher measuring accuracy and larger aperture. The system design of vertical Fizeau interferometer and the deformation theory of multi-point adjustable support method were introduced.By finite element method (FEM) analysis, the reasonable support structure is optimized and derived. Calibration of deformation of flat by gravity was obtained on 300-mm-diameter vertical Fizeau interferometer with liquid surface datum. Comparing it with detection result by three-flat method, the residual between two methods can reach 10.20 nm for peak valley (PV), and 1.56 nm for root mean square (RMS).
- large aperture optical plane,
- gravity deformation,
- absolute test,
- finite element method

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References

[1]	EVANS C J. Certification, self-calibration, and uncertainty in testing flats[J]. Proceeding of SPIE,2010,76560:1-6.
[2]	BURKE J, OREB B, NETTERFIELD R. Customized three-flat calibration method for a 320 mm aperture Fizeau interferometer with vertical optical axis[J]. Proc. ASPE,2005,31:1-6.
[3]	SCHULZ M, EHRET G, KŘEN P. High accuracy flatness metrology within the European metrology research program[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,2013,710:37-41.
[4]	SIEWERT F, BUCHHEIM J, ZESCHKE T, et al. On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology[J]. Journal of Synchrotron Radiation,2014,21(5):968-975. doi: 10.1107/S1600577514016221
[5]	DEW G D. The measurement of optical flatness[J]. Journal of Scientific Instruments,1966,43(7):409-415. doi: 10.1088/0950-7671/43/7/301
[6]	International Bureau of Weights and Measures. Evaluation of measurement data — Guide to the expression of uncertainty in measurement[M]. France: First edition, 2008.
[7]	TOSHIYUKI T, OSAWA S, KURIYAMA Y, et al. Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty[J].SPIE, 2003, 5190:431-439.
[8]	BURKE J, GRIESMANN U. Calibrating the sag due to gravity of horizontal interferometer reference flats[J]. Proceeding of SPIE,2012,84930:1-9.
[9]	KONDO Y, BITOU Y. Evaluation of the deformation value of an optical flat under gravity[J]. Measurement Science and Technology,2014,25(6):064007. doi: 10.1088/0957-0233/25/6/064007
[10]	POKORNÝ P. Gravity induced deflection of a reference plate and tested plane surfaces and its influence on optical measurement with the Fizeau interferometer[J]. Proceeding of SPIE,2015,944210:1-12.
[11]	ZHU Xueliang. Research on the calibration method of reference flat based on deformation by gravity[J]. Proceeding of SPIE,2018,10827:108272Q.
[12]	ZHENG D H, CHEN L, KONG L, et al. System design and error correction for 300 mm aperture vertical Fizeau spatial-temporal phase-shifting interferometer[J]. Applied Optics,2020,59(8):2512-2520.
[13]	DECK L L, DE GROOT P J, SOOBITSKY J A. Large-aperture, equal-path interferometer for precision measurements of flat transparent surfaces[J]. Applied Optics,2014,53(8):1546. doi: 10.1364/AO.53.001546
[14]	GU Wei. Removal of surface figure deformation due to gravity in optical test[J]. Proceeding of SPIE,2014,928209:1-7.
[15]	QUAN H Y, GU W, HOU X, et al. Model-based optimization of gravity sagging for a horizontally mounted optical flat[J]. Applied Optics,2016,55(5):993. doi: 10.1364/AO.55.000993
[16]	VENTSEL E, KRAUTHAMMER T. Thin plates and shells[M]. Boca Raton: CRC Press, 2001.
[17]	ARTEMIEV N A, CHOW K P, LA CIVITA D, et al. Optimal setting of bendable optics based on FEA calculations[J]. Proceeding of SPIE,2012,8501:850107. doi: 10.1117/12.929098
[18]	YUMOTO H, MATSUYAMA S, MIMURA H, et al. Absolute calibration of optical Flats using the three-flat test by considering the relative humidity change[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,2013,710:2-6.
[19]	YASHCHUK V V, ARTEMIEV N A, LACEY I, et al. Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for X-ray optics[J]. Optical Engineering,2015,54(10):104104. doi: 10.1117/1.OE.54.10.104104
[20]	AMICK H, GENDREAU M, BUSCH T, et al. Evolving criteria for research facilities: vibration[J]. Proceeding of SPIE,2005,5933:593303. doi: 10.1117/12.617970
[21]	CHATTERJEE S, PAVAN KUMAR Y, SINGH R, et al. Measurement of the surface form error of large aperture plane optical surfaces with a polarization phase-shifting liquid reference reflection Fizeau interferometer[J]. Applied Optics,2016,55(2):310. doi: 10.1364/AO.55.000310
[22]	CHU J, GRIESMANN U, WANG Q D, et al. Deformation-free form error measurement of thin, plane-parallel optics floated on a heavy liquid[J]. Applied Optics,2010,49(10):1849. doi: 10.1364/AO.49.001849
[23]	GRIESMANN U. Three-flat tests including mounting-induced deformations[J]. Optical Engineering,2007,46(9):093601. doi: 10.1117/1.2784531
[24]	ZHOU Y, LIU S J, LU Q, et al. In situ absolute surface metrology for a 600 mm aperture interferometer[J]. Optics and Lasers in Engineering,2020,129:106054. doi: 10.1016/j.optlaseng.2020.106054
[25]	王贵林, 朱俊辉, 李嘉祥, 等. 大口径光学元件表面疵病在位检测与评价研究[J]. 应用光学,2019,40(6):1167-1173. doi: 10.5768/JAO201940.0605005 WANG Guilin, ZHU Junhui, LI Jiaxiang, et al. In situ detection and evaluation of surface defects for large-aperture optical elements[J]. Journal of Applied Optics,2019,40(6):1167-1173. doi: 10.5768/JAO201940.0605005

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Distortion correction research by gravity for 300-mm-aperture flat based on multi-point adjustable support