Method of thin film thickness measurement based on laser heterodyne interferometry

SHI Kai; SU Junhong; QI Yuan

doi:10.5768/JAO201940.0303003

Journal of Applied Optics > 2019 > 40(3): 473-477. > DOI: 10.5768/JAO201940.0303003

SHI Kai, SU Junhong, QI Yuan. Method of thin film thickness measurement based on laser heterodyne interferometry[J]. Journal of Applied Optics, 2019, 40(3): 473-477. DOI: 10.5768/JAO201940.0303003

Citation:

SHI Kai, SU Junhong, QI Yuan. Method of thin film thickness measurement based on laser heterodyne interferometry[J]. Journal of Applied Optics, 2019, 40(3): 473-477. DOI: 10.5768/JAO201940.0303003

Citation:

SHI Kai, SU Junhong, QI Yuan. Method of thin film thickness measurement based on laser heterodyne interferometry[J]. Journal of Applied Optics, 2019, 40(3): 473-477. DOI: 10.5768/JAO201940.0303003

PDF (538 KB)

Method of thin film thickness measurement based on laser heterodyne interferometry

SHI Kai^{1, 2,},
SU Junhong^{1, 2},
QI Yuan³

1.
School of Optoelectronic Engineering, Xi'an Technological University, Xi'an 710021, China
2.
Shaanxi Key Laboratory of Photoelectricity Measurement and Instrument Technology, Xi'an Technological University, Xi'an 710021, China
3.
Xi'an Institute of Applied Opitcs, Xi'an 710065, China

More Information

Received Date: October 16, 2018
Revised Date: December 05, 2018

Graphical Abstract

Abstract

Abstract

For the difficulty of measuring the thin film thickness, a method of thin film thickness measurement based on laser heterodyne interferometry was proposed. Using the classical Michelson interference optical path, the heterodyne interference principle was used to convert the film thickness difference into the optical path difference, and the precise displacement table was used as the scanning mechanism to realize the progressive scanning measurement of the film thickness. Results show that the shift of the measurement system within 20 min under constant temperature experimental conditions does not exceed 8 nm, and the average deviation of the measurement results is less than 1 nm. Comparing with the measurement results of the ellipsometer, the measurement difference is 12.97 nm, indicating the feasibility of the method.
- laser interferometry,
- heterodyne,
- thin film thickness,
- measurement

FullText(HTML)

References (16)

References

[1]	戴蓉, 谢铁邦, 常素萍.垂直扫描白光干涉表面三维形貌测量系统[J].光学技术, 2006, 32(4):545-548. http://d.old.wanfangdata.com.cn/Periodical/gxjs200604011 DAI Rong, XIE Tiebang, CHANG Suping. A vertical scanning white-light interfering profilometer[J]. Optical Technique, 2006, 32(4):545-548. http://d.old.wanfangdata.com.cn/Periodical/gxjs200604011
[2]	陈凯, 崔明启, 郑雷, 等.nm量级薄膜厚度测量[J].强激光与粒子束, 2008(2):234-238. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200802012 CHEN Kai, CUI Mingqi, ZHENG Lei, et al. Layer thickness measurement of super thin films[J]. High Power Laser and Particle Beams, 2008(2):234-238. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200802012
[3]	郭志峰, 郭昭华, 王永旺, 等.原子力显微镜和白光干涉仪在表面材料测试中的应用研究[J].表面技术, 2018, 47(1):254-259. http://d.old.wanfangdata.com.cn/Periodical/bmjs201801040 GUO Zhifeng, GUO Zhaohua, WANG Yongwang, et al. Application of atomic force microscope and white light interferometer in surface material tests[J]. Surface Technology, 2018, 47(1):254-259. http://d.old.wanfangdata.com.cn/Periodical/bmjs201801040
[4]	王长军, 熊胜明.大口径光学元件薄膜厚度均匀性修正[J].强激光与粒子束, 2007(7):1153-1157. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200707022 WANG Changjun, XIONG Shengming. Correction for film thickness uniformity of large aperture optical components[J]. High Power Laser and Particle Beams, 2007(7):1153-1157. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200707022
[5]	程敏, 艾力·伊沙木丁, 孙正文, 等.大口径非球面镀膜均匀性分析与修正挡板设计[J].真空科学与技术学报, 2017, 37(3):250-254. http://d.old.wanfangdata.com.cn/Periodical/zkkx201703002 CHENG Min, ALI E, SUN Zhengwen, et al. Novel correction mask for thickness uniformity improvement of coatings on large aperture aspheric surface[J]. Chinese Journal of Vacuum Science and Technology, 2017, 37(3):250-254. http://d.old.wanfangdata.com.cn/Periodical/zkkx201703002
[6]	梁海锋, 严一心.类金刚石薄膜光学特性的椭偏法研究[J].真空科学与技术学报, 2005(4):287-289. doi: 10.3969/j.issn.1672-7126.2005.04.013 LIANG Haifeng, YAN Yixin. Study on optical properties of diamond-like carbon with ellipsometry[J]. Journal of Vacuum Science and Technology, 2005(4):287-289. doi: 10.3969/j.issn.1672-7126.2005.04.013
[7]	马逊, 刘祖明, 陈庭金, 等.椭圆偏振仪测量薄膜厚度和折射率[J].云南师范大学学报(自然科学版), 2005(4):24-27. doi: 10.3969/j.issn.1007-9793.2005.04.006 MA Xun, LIU Zuming, CHEN TingJin, et al. Thin film material thickness and refractive index measurement by elliptical polarization instrument[J]. Journal of Yunan Normal University(Natural Sciences Edition), 2005(4):24-27. doi: 10.3969/j.issn.1007-9793.2005.04.006
[8]	范江玮, 王锋, 孙钦蕾, 等.多层模型计算椭偏法测量的SiO₂/Si超薄膜厚度[J].测试技术学报, 2012, 26(5):388-392. doi: 10.3969/j.issn.1671-7449.2012.05.004 FAN Jiangwei, WANG Feng, SUN Qinlei, et al. The thickness determination of SiO₂/Si ultra-thin film by spectroscopic ellipsometry through multilayer[J]. Journal of Test and Measurement Technology, 2012, 26(5):388-392. doi: 10.3969/j.issn.1671-7449.2012.05.004
[9]	黎永前, 李晓莹, 朱名铨.纳米精度外差式激光干涉仪非线性误差修正方法研究[J].仪器仪表学报, 2005(5):542-546. doi: 10.3321/j.issn:0254-3087.2005.05.027 LI Yongqian, LI Xiaoying, ZHU Mingquan. A new method to correct the nonlinear errors in heterodyne interferometry[J]. Chinese Journal of Scientific Instrument, 2005(5):542-546. doi: 10.3321/j.issn:0254-3087.2005.05.027
[10]	侯文玫, 张运波, 乐燕芬, 等.外差激光干涉测长非线性误差的消除[J].中国激光, 2012, 39(9):162-167. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201209029 HOU Wenmei, ZHANG Yunbo, LE Yanfen, et al. Elimination of the nonlinearity of heterodyne displacement interferometers[J]. Chinese Journal of Lasers, 2012, 39(9):162-167. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201209029
[11]	钟朝阳, 侯文玫, 句爱松, 等.双频激光干涉仪的混频分析与研究[J].光学技术, 2015, 41(2):119-123. http://d.old.wanfangdata.com.cn/Periodical/gxjs201502006 ZHONG Chaoyang, HOU Wenmei, JU Aisong, et al. Analysis of frequency mixing in dual-frequency interferometer[J]. Optical Technique, 2015, 41(2):119-123. http://d.old.wanfangdata.com.cn/Periodical/gxjs201502006
[12]	石一磊, 苏俊宏, 杨利红, 等.基于相位偏移干涉术的薄膜厚度测量方法[J].应用光学, 2009, 30(1):76-79, 83. doi: 10.3969/j.issn.1002-2082.2009.01.018 SHI Yilei, SU Junhong, YANG Lihong, et al. Measuring thin-film thickness with phase-shift interferometry[J]. Journal of Applied Optics, 2009, 30(1):76 -79, 83. doi: 10.3969/j.issn.1002-2082.2009.01.018
[13]	苏俊宏, 刘奕辰.测量薄膜厚度的数字叠栅技术[J].中国激光, 2012, 39(11):104-108. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201211020 SU Junhong, LIU Yichen. Digital Moiré technique for thin film thickness measurement[J]. Chinese Journal of Lasers, 2012, 39(11):104-108. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg201211020
[14]	HOU W M, GUNTER W. Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Precision Engineering, 1992, 14(1):91-98. http://cn.bing.com/academic/profile?id=e6f9855a0840c6397a1f98c9abdf2836&encoded=0&v=paper_preview&mkt=zh-cn
[15]	SHI Kai, SU Junhong, HOU Wenmei. Roll angle measurement system based on differential plane mirror interferometer[J]. Optics Express, 2018, 26(16):19826-19834. doi: 10.1364/OE.26.019826
[16]	乐燕芬, 句爱松.外差激光干涉仪非线性误差分析及测量[J].激光与光电子进展, 2016, 53(5):203-212. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201605023 LE Yanfen, JU Aisong. Analysis and measurement of the nonlinear errors in heterodyne interferometers[J]. Laser & Optoelectronics Progress, 2016, 53(5):203-212. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201605023

[1]	Wang Kai, Zhang Yu, Liu Zhuo, Zhang Juan, Feng Xiaoqiang. Realization of position shift mechanical measurement based on duo laser heterodyne[J]. Journal of Applied Optics, 2017, 38(1): 72-77. DOI: 10.5768/JAO201738.0103003
[2]	Liu Dan, Zheng Bin, Guo Hua-ling, Liu Hui, Liu Nai-qiang. Micro-vibration measuring technology based on heterodyne interference[J]. Journal of Applied Optics, 2014, 35(5): 858-861.
[3]	MI Qian, ZHAO Lei. New algorithm for monitoring optical thin-film thickness[J]. Journal of Applied Optics, 2014, 35(2): 248-253.
[4]	LIU Mei-lian, CAI Hui-min. Vision measurement for impact point[J]. Journal of Applied Optics, 2011, 32(5): 949-954.
[5]	SHANG Xiao-yan, HAN Jun, LI Qi, WANG Song. Real-time spectrum measurement in thin-film thickness wideband monitoring system[J]. Journal of Applied Optics, 2011, 32(5): 937-941.
[6]	ZHOU Xiao-shan, LI Yan. Absolute distance measurement by combining phase distance meter and heterodyne interferometer[J]. Journal of Applied Optics, 2010, 31(6): 1013-1017.
[7]	SHI Yi-lei, SU Jun-hong, YANG Li-hong, XU Jun-qi. Measuring thin-film thickness with phase-shift interferometry[J]. Journal of Applied Optics, 2009, 30(1): 76-79.
[8]	YANG Zhao-jin, WANG Lei, LI Gao-ping, XU Rong-guo. Explanation of verification procedure for tester of optical film refractive index and thickness[J]. Journal of Applied Optics, 2007, 28(4): 517-519.
[9]	WANG Xue-hua, XUE Yiyu, CAO Hong. MathCAD applied to testing of the optical constants for thin films with ellipsometer[J]. Journal of Applied Optics, 2006, 27(3): 254-257.
[10]	JIANG Li, LUO Shao-xuan, YANG Yan, YANG Ke-ling. Thickness measurement of thin film for holographic plate by Michelson interferometer[J]. Journal of Applied Optics, 2006, 27(3): 250-253.

Cited By

Cited by

Periodical cited type(6)

1.	刘维慧，梁润泽，赵泉昕，卓朝博，苗永平. 双光源干涉法测量液态薄膜厚度. 大学物理实验. 2024(01): 31-36 .
2.	易进，张瑞，薛鹏，卜韩，王志斌，李孟委. 基于弹光调制的椭偏测量驱动电路系统设计. 电子设计工程. 2024(04): 32-36+42 .
3.	杨楠卓，欧阳名钊，周维虎，陈晓梅. 基于光谱反射技术的梯形刻面MEMS高深宽比沟槽深度测量仿真分析. 长春理工大学学报(自然科学版). 2020(02): 48-52+114 .
4.	刘学聪，苗昕扬，詹洪磊，朱明达，张善哲，赵昆. 基于激光感生电压技术的咖啡粉粒径检测. 应用光学. 2020(05): 1117-1121 . 本站查看
5.	肖平平，王霏，邓满兰. 基于金属包覆波导结构的纳米间隙测量研究. 激光与光电子学进展. 2020(21): 273-277 .
6.	肖平平，王霏，邓满兰，胡红武. 基于LSPR的非贵金属纳米薄膜厚度的精确测量. 光电子·激光. 2019(12): 1286-1290 .

Other cited types(5)

Get Citation

PDF

XML

Article views (1565) PDF downloads (96) Cited by(11)

Turn off MathJax

Article Contents

Abstract

References

Method of thin film thickness measurement based on laser heterodyne interferometry