Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR

ZHANG Shan; SHEN Yiming; LIU Dan; ZHONG Yanhong; WEI Yanfeng; LIAO Qingjun; CHEN Honglei; LIN Chun; DING Ruijun; HE Li

doi:10.5768/JAO201940.0202004

Journal of Applied Optics > 2019 > 40(3): 429-434. > DOI: 10.5768/JAO201940.0202004

ZHANG Shan, SHEN Yiming, LIU Dan, ZHONG Yanhong, WEI Yanfeng, LIAO Qingjun, CHEN Honglei, LIN Chun, DING Ruijun, HE Li. Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR[J]. Journal of Applied Optics, 2019, 40(3): 429-434. DOI: 10.5768/JAO201940.0202004

Citation:

PDF (1220 KB)

Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR

1.
Key Laboratory of Infrared Imaging Material and Detectors, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
2.
School of information Science and Technology, Shanghai 201210

More Information

Received Date: October 24, 2018
Revised Date: November 07, 2018

Graphical Abstract

Abstract

Abstract

To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.
- ultra-spectrum detection,
- Vis/NIR spectral imaging,
- HgCdTe,
- substrate removal,
- quantum efficiency

FullText(HTML)

References (15)

References

[1]	张若岚, 陈洁.从单波段到超光谱——面向多维信息感知的红外光谱成像技术[J].红外技术, 2014, 36(4):257-264. http://d.old.wanfangdata.com.cn/Periodical/hwjs201404001 ZHANG Ruolan, CHEN Jie. From single-band to ultraspectral——infrared spectral imaging technology oriented to multi-dimension information awareness[J], Infrared Technology, 2014, 36(4):257-264. http://d.old.wanfangdata.com.cn/Periodical/hwjs201404001
[2]	GOETZ A, VANE G, Imaging spectrometry of earth remote sensing[J]. Science, 1985, 228:1147-1153. doi: 10.1126/science.228.4704.1147
[3]	BRECKINRIDGE J B. Evolution of imaging spectrometry:past, present, and future[J]. SPIE, 1996, 2819:2-6. http://d.old.wanfangdata.com.cn/OAPaper/oai_pubmedcentral.nih.gov_3757728
[4]	孙允珠, 蒋光伟, 李云端, 等.高光谱观测卫星及应用前景[J].上海航天, 2017, 34(3):1-13. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shht201703001 SUN Yunzhu, JIANG Guangwei, LI Yunduan, et al. Hyper-spectral observation satellite and it's application prospect[J]. Aerospace Shanghai, 2017, 34(3):1-13. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=shht201703001
[5]	贺霖, 潘东, 邸辑, 等.高光谱图像目标检测研究进展[J].电子学报, 2009, 37(9):2016-2024. doi: 10.3321/j.issn:0372-2112.2009.09.024 HE Lin, PAN Dong, DI Ji, et al. Research advance on target detection for hyperspectral imagery[J]. Acta Electronica Sinica, 2009, 37(9):2016-2024. doi: 10.3321/j.issn:0372-2112.2009.09.024
[6]	熊伟.星载超光谱大气主要温室气体监测载荷[J].航天返回与遥感, 2018, 39(3):14-24. doi: 10.3969/j.issn.1009-8518.2018.03.002 XIONG Wei. Hyperspectral greenhouse gases monitor instrument(GMI) for spaceborne payload[J]. Spacecraft Recovery & Remote Sensing, 2018, 39(3):14-24. doi: 10.3969/j.issn.1009-8518.2018.03.002
[7]	PIQUETTEE C, EDWALLD D, ARNOLD H, et al. Substrate-removed HgCdTe-based focal-plane arrays for short-wavelength infrared astronomy[J]. Journal of Electronic Materials, 2008, 37(9):1396-1400. doi: 10.1007/s11664-008-0421-8
[8]	ROGALSKI A. Infrared detectors:status and trends[J]. Progress in Quantum Electronics, 2004, 27:59-210. http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201212003
[9]	高国龙.法国Sofradir公司的空间高光谱传感技术[J].红外, 2017, 38(2):46-48. doi: 10.3969/j.issn.1672-8785.2017.02.008 GAO Guolong. Hyperspectral remote sensing technology of Sofradir Co. in France[J]. Infrared, 2017, 38(2):46-48. doi: 10.3969/j.issn.1672-8785.2017.02.008
[10]	陈宇恒, 季轶群, 周建康, 等.机载可见-红外超光谱成像仪信噪比的估算[J].红外与激光工程, 2012, 41(9):2300-2303. doi: 10.3969/j.issn.1007-2276.2012.09.010 CHEN Yiheng, JI Yiqun, ZHOU Jiankang, et al. Signal-to-noise ratio evaluation of airborne visible-infrared hyperspectral imaging spectrometer[J]. Infrared and Laser Engineering, 2012, 41(9):2300-2303. doi: 10.3969/j.issn.1007-2276.2012.09.010
[11]	ASAHI T, ODA O, TANIGUCHI Y, et al. Characterization of 100mm Diameter CdZnTe single crystals grown by the vertical gradient freezing method[J]. Journal of Crystal Growth, 1995, 149(1-2):23-29. doi: 10.1016/0022-0248(94)00966-X
[12]	NGUYEN T, LORANS D. Highlights of recent results on HgCdTe thin film photo-conductors[J].Semiconductor Science and Technology, 1991, 6:93-95. doi: 10.1088/0268-1242/6/2/004
[13]	LO VECCHIO P, WONG K, PARODOS T, et al. Advances in liquid phase epitaxial growth of Hg1-xCdxTe for SWIR through VLWIR photodiodes[J]. SPIE, 2004, 5564:65-72. doi: 10.1117/12.566470.full
[14]	CHANDRA D, TREGILGAS J H, GDDOWIN M W. Dislocation density variations in HgCdTe films grown by dipping liquid phase epitaxy:Effects on metal-insulator-semiconductor properties[J]. Journal of Vacuum Science Technology B, 1991, 9(3):1852-1857. doi: 10.1116/1.585811
[15]	LU W, HE L, CHEN X S, et al. The development of HgCdTe infrared detector technology in China[J], SPIE, 2009, 7298: 72982Z-1-13.

Cited By

Cited by

Periodical cited type(2)

1.	李兴春，樊新龙，张小军，周虹，官春林，顾乃庭. 基于遗传算法的变形反射镜快速设计. 激光与光电子学进展. 2023(01): 348-355 .
2.	周浩，王欣，刘强，贾建军，舒嵘. 渐变厚度主动变形镜的研究. 光学学报. 2021(24): 218-227 .

Other cited types(2)

Get Citation

PDF

XML

Article views (1210) PDF downloads (48) Cited by(4)

Turn off MathJax

Article Contents

Abstract

References

Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR