Design of optical system for broad-band micro-spectrometer

Aiming at the situation that there have been less researches on the wide-band micro-spectrometer based on the M type Czerny-Turner structure, the wide-band micro-spectrometer was designed and the complete design flow was put forward. According to the principle of geometrical optics, the constraint relations among the parameters of optics system were analyzed, then the main parameters were obtained through design and calculation, and simulation was conducted by using Zemax.The measurement results for actual production of the spectrometer show that the resolution reaches 1.5 nm in 200 nm~1100 nm full band and 1 nm in mid, which meets the demands of the design.