Optical design of wide-angle multi-wavelength f-theta lens

The f-theta lens is an important essential component in laser scanning systems that plays a decisive role in working surface, measuring speed and measurement accuracy, etc. A wide-angle f-theta lens operating at 486 nm ~ 656 nm is designed to change the range of small f-theta lens scanning range and single operating wavelength.Through the primary aberration analysis, the primary structure parameters of the system are determined, and the chromatic aberration correction is carried out by using the optical power distribution with different dispersion properties. The final design result shows that the lateral color is less than 3 μm, the calibrated f-Theta distortions are all less than 0.015% and the energy utilization rate is nearly 90%, which means that the focusing performances are close to the diffraction-limited. The system meets the requirements of high-precision laser marking systems with different waves.