Visualization of nanometer head slider lubricant films based on ellipsometric microscope

Liu Qingqing; Su Yang

doi:10.5768/JAO201738.0303001

Journal of Applied Optics > 2017 > 38(3): 434-437. > DOI: 10.5768/JAO201738.0303001

Liu Qingqing, Su Yang. Visualization of nanometer head slider lubricant films based on ellipsometric microscope[J]. Journal of Applied Optics, 2017, 38(3): 434-437. DOI: 10.5768/JAO201738.0303001

Citation:

Liu Qingqing, Su Yang. Visualization of nanometer head slider lubricant films based on ellipsometric microscope[J]. Journal of Applied Optics, 2017, 38(3): 434-437. DOI: 10.5768/JAO201738.0303001

Citation:

Liu Qingqing, Su Yang. Visualization of nanometer head slider lubricant films based on ellipsometric microscope[J]. Journal of Applied Optics, 2017, 38(3): 434-437. DOI: 10.5768/JAO201738.0303001

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Visualization of nanometer head slider lubricant films based on ellipsometric microscope

Liu Qingqing^{1, 2,},
Su Yang¹

1.
College of Information & Control, Nanjing University of Information Science & Technology, Nanjing 210044, China
2.
Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing University of Information Science & Technology, Nanjing 210044, China

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Received Date: August 21, 2016
Revised Date: November 13, 2016

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Abstract

Abstract

Aiming at the problems of shift of lubricant films on head slider, and dynamic change visualization of lubricant films on head slider, this paper presents caculation model of lubricant thickness distribution on a head slider surface using phase shift method, which is base on improved vertical-objective-based ellipsometric microscope (VEM). Measurement of lubricant film thickness is achived with this method. Taking nonpolar perfluoropolyether (PFPE) lubricant Z03 as a sample, ellipsometric microscope is calibrated; while taking polar PFPE lubricant Zdol4000 as a sample, dewetting on head slider surface is observed. Experimental results show measuring accuracy and resolution are 0.37 nm and 0.36 μm respectively. This can be reference for other visualization of nm lubricant films.
- optical measurement,
- visualization of lubricant films,
- ellipsometric microscope,
- phase shift method

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References (11)

References

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