Laser alignment measurement method based on focusing objective and PSD

Zhang Yizhou; Lu Yuanfu; Chen Liangpei; She Rongbin; Ma Tianyue; Liu Xianming

doi:10.5768/JAO201738.0207004

Journal of Applied Optics > 2017 > 38(2): 327-330. > DOI: 10.5768/JAO201738.0207004

Zhang Yizhou, Lu Yuanfu, Chen Liangpei, She Rongbin, Ma Tianyue, Liu Xianming. Laser alignment measurement method based on focusing objective and PSD[J]. Journal of Applied Optics, 2017, 38(2): 327-330. DOI: 10.5768/JAO201738.0207004

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Laser alignment measurement method based on focusing objective and PSD

Zhang Yizhou^{1, 2, 3,},
Lu Yuanfu^{1, 2, 3, ,},
Chen Liangpei^{1, 2, 3},
She Rongbin^{1, 2, 3},
Ma Tianyue⁴,
Liu Xianming⁴

1.
Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
2.
The Chinese University of Hong Kong, Hong Kong 999077, China
3.
Biomedical Engineering Laboratory for Photoelectric Sensing Technology, Shenzhen 518055, China
4.
Shenzhen yateks optical electronic technology corporation, Shenzhen 518172, China

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Received Date: July 26, 2016
Revised Date: November 22, 2016

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Abstract

Abstract

A laser alignment measurement method based on a focusing objective and PSD is proposed in order to solve the problem of mathematical model in traditional laser alignment method, which is complex and difficult to work out. Misalignment angle deviation and position deviation are acquired using relations between field of view and focal length of the optical system, and the principle of similar triangle. The measurement principle is simple and easy solving. The experiment results show that when position measurement range is 0.5 mm~1.5 mm and angle measurement range is 0.047 7°~0.143 2°, accuracy of position deviation measurement and angle deviation measurement are 0.035 mm~0.207 mm and 0.000 2°~0.012 8° respectively. Finally, error of accuracy is analyzed and a method considered for eliminating influence of installation error is proposed, and a theoretical formula is given.
- shaft alignment,
- laser alignment,
- angle deviation measurement,
- position deviation measurement,
- focusing objective,
- PSD

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References

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