Multi-spectral target design and application based on two-dimensional galvanometer

In order to improve detection precision based on optical axis parallelism of two-dimensional galvanometer and simplify measurement procedure, a multi-spectral integrated target based on two-dimensional galvanometer scanning system is designed. Through integration of multi-spectral target plate and LED lighting source, problems of frequent replacement, repeated adjustment of target plate and light source in a special target are solved. Centering accuracy of CCD detection method is improved by using two-dimensional galvanometer, and Cassegrain collimation system with optimized aberration is used to improve quality of cross-sectional imaging. With optical axis parallelism test, calibration accuracy of multi-spectral integrated target reaches 0.10mard, which meets requirements of high precision and automatic detection of optical axis parallelism of multi-spectral opto-electronic systems.