Method for increasing HWS sampling rate on lens micro-scanning

In order to improve the shortcoming of insufficient sampling of measured wavefront in traditional Hartmann-Shack wavefront sensor(HWS), the HartmannShack wavefront sensor and micro-scanning technology were analyzed, at the same time, the method of lens micro-scanning by raising the sampling rate in Hartmann-Shack wavefront sensor was proposed . The lens scanning device driven by PbZrTiO3 (PZT) was added before the microlens array,and the highresolution micro-scanning image was reconstructed for the spot distribution collected by the charge coupled device (CCD) . After the wavefront reconstruction of the rebuilt spot distribution, the sampling rate of measured wavefront was improved in Hartmann-Shack wavefront sensor. Comparison experiments verify that the method can raise the recovered accuracy of wavefront by 41%, and it can effectively increase the accuracy of wavefront detection in Hartmann-Shack wavefront sensor.