离子束修形技术

Ion beam figuring technology

摘要: 离子束修形技术具有精度高、确定性好等优点，应用越来越广泛。介绍了离子束修形技术的原理和特点，以及国外离子束修形技术的发展历程和现状，并介绍了国内离子束修形技术的发展现状。针对当前离子束修形技术的研究热点，如中高频误差控制技术、驻留时间求解算法和加工工艺等方面，综述了国内外的研究现状。

Abstract: The ion beam figuring (IBF) technology is widely used for precision and deterministic process. This paper introduced the principles and characteristics of IBF, described its development status at home and abroad, summarized the research focus of IBF such as the technology to control the mid-high spatial frequency error, the algorithm to solve dwell time, and the processing technique.