微通道板输入电极对开口面积比的影响及改进研究

王鹏飞; 邱祥彪; 邵爱飞; 孙赛林; 丛晓庆; 金戈; 孙建宁; 王健; 乔芳建; 高鹏; 赵胜; 陈坤杨

doi:10.5768/JAO202243.0604016

微通道板输入电极对开口面积比的影响及改进研究

doi: 10.5768/JAO202243.0604016

1.
北方夜视科技（南京）研究院有限公司，江苏南京 211106
2.
北方夜视技术股份有限公司，云南昆明 650217）

基金项目: 国家自然科学基金青年基金项目（12003010）

详细信息

作者简介:
王鹏飞（1992—），男，硕士研究生，工程师，主要从事微通道板制造工艺技术研究。E-mail：custwangpengfei@163.com

通讯作者:
邱祥彪（1989—），男，硕士研究生，工程师，主要从事微通道板及微通道板型光电探测器技术研究。E-mail：ndqxb@163.com

中图分类号: TN233
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- 文章访问数: 81
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- 被引次数: 0
出版历程
- 收稿日期: 2022-08-17
- 修回日期: 2022-10-12
- 网络出版日期: 2022-11-09
- 刊出日期: 2022-11-14

Influence of input electrode of micro-channel plate on opening area ratio and its improvement

1.
North Night Vision Science and Technology (Nanjing) Research Institute Co., Ltd., Nanjing 211106, China
2.
North Night Vision Technology Co., Ltd., Kunming 650217, China

摘要

摘要: 微通道板作为一种关键的电子倍增器件，广泛应用于诸多领域。分析了NiCr膜层作为微通道板的输入端电极时，对微通道板开口面积比的影响，建立了理论模型，计算了膜层厚度、镀膜深度等参数对开口面积比的影响。开展了2种减小开口面积比损失的镀膜研究：一是进行工艺调整，减弱合金蒸发的分馏效应，降低电极膜层的电阻率，开口面积比损失量降低约2%；二是改变镀膜方式，使用Ni、Cr金属单质镀制叠层薄膜，在镀膜过程中调控镍、铬的比例，将输入端电极中镍比例升高，同样可以降低电极膜层的电阻率，在满足面电阻要求的前提下，可减薄输入端膜层至86 nm，与300 nm厚度的常规镍铬合金膜层相比，MCP输入端的开口面积比损失量降低3%~4%，MCP增益提升6%。
- 微通道板 /
- 开口面积比 /
- 输入电极 /
- 叠层薄膜电极
Abstract: As a key electron multiplier, the micro-channel plate is widely used in many fields. The effect of NiCr film as the input electrode of micro-channel plate on the opening area ratio of micro-channel plate was analyzed. A theoretical model was established, and the effects of coating thickness, coating depth and other parameters on the opening area ratio were calculated. Two kinds of coating research were carried out to reduce the loss of opening area ratio. One way, the process was adjusted to weaken the fractionation effect of alloy evaporation, reduce the resistivity of electrode film layer, and the loss of opening area ratio was reduced by about 2 percentage points. Another way was to change the coating method, the Ni and Cr metal were used to prepare laminated films, regulate the proportion of Ni and Cr in the coating process, increase the proportion of Ni in the input terminal electrode, and also reduce the resistivity of the electrode film. On the premise of meeting the surface resistance requirements, the input terminal film could be thinned to 86 nm. Compared with the conventional Ni-Cr alloy film with a thickness of 300 nm, the loss of the opening area ratio of the MCP input terminal was reduced by 3~4 percentage points, and the MCP gain was increased by 6%.
- micro-channel plate /
- opening area ratio /
- input electrode /
- laminated film electrode

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图 1 电极膜层影响开口面积比模型

Fig. 1 Model of OAR influenced by electrode film

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图 2 通道内壁镀膜俯视图

Fig. 2 Top view of coating in channel inner wall

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图 3 膜层厚度、孔径对于MCP开口面积比的影响

Fig. 3 Effect of film thickness and aperture on opening area ratio of MCP

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图 4 NiCr叠层结构示意图

Fig. 4 Schematic diagram of NiCr laminated structure

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图 5 MCP输入端NiCr叠层实物图与孔径测量实物图

Fig. 5 Physical drawing of NiCr laminated film and aperture measurement at MCP input terminal

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图 6 输入端膜层Cr∶Ni=1∶5的EDS能谱图

Fig. 6 EDS energy spectrum of input terminal film when Cr∶Ni = 1∶5

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图 7 原镀膜工艺膜层实物图与孔径测量实物图

Fig. 7 Physical drawing of film layer and aperture measurement of original coating process

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图 8 原镀膜工艺制出输入端膜层EDS能谱图

Fig. 8 EDS energy spectrum of input terminal film prepared by original coating process

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表 1 蒸镀工艺与电阻率的关系表

Table 1 Relationship between evaporation process and resistivity

蒸镀工艺	电阻率/×10⁻⁶ Ω·m
原工艺	6.13
工艺一	5.74
工艺二	5.59

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表 2 蒸镀工艺与方块电阻的关系表

Table 2 Relationship between evaporation process and square resistance

蒸镀工艺	开口面积比/%
原工艺	59.4
工艺二	61.7

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表 3 叠层工艺与方块电阻的关系表

Table 3 Relationship between lamination process and square resistance

Cr∶Ni	MCP编号	膜层厚度/nm	电阻率/（×10⁻⁶ Ω·m）
原镀膜工艺对照（1∶1）	0091-423	289	5.92
原镀膜工艺对照（1∶1）	0091-441	293	5.85
1∶2	0091-478	306	1.51
	0091-476	312	1.36
1∶4	0091-479	295	1.01
	0091-484	298	1.04
1∶5	0091-490	304	0.93
	0091-486	306	0.89

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表 4 原镀膜工艺与Cr∶Ni=1∶5时，800V电压下MCP增益对比表

Table 4 Comparison of MCP gain under 800 V voltage between original coating process and Cr∶Ni = 1∶5

原工艺	2 296
输入Cr∶Ni=1∶5	2 436
增益变化/%	6.1

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