利用环形子孔径拼接法检测非球面反射镜

李江; 杨朋利; 李文婷; 王芝; 安静; 冯婕; 马爱秋; 付晓庆

doi:10.5768/JAO201536.0503005

利用环形子孔径拼接法检测非球面反射镜

doi: 10.5768/JAO201536.0503005

1.
西安应用光学研究所,陕西西安 710065

详细信息

通讯作者:
李江（1989-），男，陕西西安人，硕士研究生，主要从事光学检测研究工作。Email:jianglee@outlook.com

中图分类号: TN206
计量
- 文章访问数: 1535
- HTML全文浏览量: 125
- PDF下载量: 116
- 被引次数: 0
出版历程

Annular sub-aperture stitching used for aspheric testing

1.
Xi’an Institute of Applied Optics,Xi’an 710065,China

摘要

摘要: 为解决高精度检测非球面反射镜的难题，提出利用Zygo干涉仪完成非球面环形子孔径检测。通过移动待测非球面，使得由干涉仪产生的参考球面波，以不同的曲率半径匹配待测非球面的各个环带区域，分别测试每个环带，进而完成对整个非球面的拼接检测。以双曲面反射镜为例进行拼接检测，并搭建辅助光路，利用无像差点法对拼接结果进行验证。验证结果表明：该方法测量误差小于1/20 （=632.8 nm）。
- 环形子孔径 /
- Zygo干涉仪 /
- 非球面检测
Abstract: In order to solve the problem of high-precision measurement of aspheric mirror,we put forward the method of aspheric annular sub-aperture stitching testing by using Zygo interferometer.By moving the stay of the testing aspheric surface,the reference spherical waves produced by the inteferometer could match the different band areas of the testing aspheric surface with different curvature radii, each annulus was tested,then the whole aspheric surface testing could be completed.A hyperboloid reflector was tested with annular sub-aperture stitching, and a light path was set up to verify the stitching result using aberrationfree point method . The results show that the error is less than 1/20 (=632.8 nm).
- annular sub-aperture stitching /
- Zygo interferometer /
- aspheric testing

HTML全文

参考文献(1)

[1]Wang Xiaokun，Wang Lihui, Zhang Xuejun. Testing asphere by sub-aperture stitching interferometric method[J].Optics and Precision Engineering,2007,15(2):192-198.王孝坤，王丽辉，张学军. 子孔径拼接干涉法检测非球面[J].光学精密工程，2007,15（2）：192-198.
[2]Zhang Rongzhu, Shi Qikai,Cai Bangwei,et al.Subaperture stitching interferometric detection experimental[J]. Optical Technology, 2004, 30(2):173-175.
张蓉竹，石琪凯，蔡邦维，等.子孔径拼接干涉检测实验研究[J].光学技术，2004,30（2）：173-175.
[3]Wang Xiaokun,Zheng Ligong,Zhang Xuejun,et al.Testing an offaxis asphere by subaperture stitching interferometry[J].Acta Photonica Sinica,2011,40(1):92-97.
王孝坤，郑立功，张学军，等.子孔径拼接干涉检测离轴非球面研究[J].光子学报，2011,40（1）：92-97.
[4]Ji Bo.Testing asphere optical components by subapertue stitching Interferometer [D]. Nanjing : Nanjing University of Science and Technology, 2008. 12-29.
季波. 子孔径拼接干涉检测非球面光学元件[D]. 南京: 南京理工大学, 2008.12-29.
[5]Tiziani H J,Reiehelt S,Prub C, et al. Testing of aspheric surfaces[J]. SPIE, 2001,4440:109-119.
[6]Hou Xi, Wu Fan. Annular sub-aperture interferometric testing technique for large aspheric surface[J].SPIE,2005,5786:113-121.
[7]Sasaki K,Ono A. Optical aspheric surface profiler using phase shift interferferometer:US,5416586[P].1991-01-01.
[8]Mauro M,Luca P. Interferometric testing of annular aperture[J].SPIE, 1992, 1781:241-248.
[9]Chen Shanyong. Geometrical approach to sub-aperture stitching interferometry for aspheric surfaces[D]. Changsha: National University of Defense Technology, 2006: 1-16.
陈善勇. 非球面子孔径拼接干涉测量的几何方法研究[D].长沙: 国防科学技术大学, 2006:1-16.
[10]Bai Jian, Cheng Shangyi, Yang Guoguang. Subaperture aligment technique for large aperture mirrors [J]. Acta Optica Sinica,1997, 17(7) : 953-956.
白剑, 程上彝, 杨国光. 大口径镜面的多孔径拼接技术[J]. 光学学报, 1997, 17(7): 953-956.

施引文献

资源附件(0)

访问统计