Abstract: To eliminate the punching error of the flexible printed circuits（FPC） caused by the deformation of the films during the running time of the trim puncher, we used the images of the target after punching to measure the distance between the dies and the punching edge, and calculated the error of the system in order to do error compensation. The experiment results demonstrate that, after error compensation, the root-mean-square error of the punching position, respectively, reduces by 41.6% and 17.0% in X-direction and in Y-direction, the process capability index of system is 1.6118. We used film to extend the dimensions of the FPC production and increase the useful area of the production, so that the cost of production could decrease. The proposed rapid superresolution measurement, without using image registration, enable to reduce the position error of image edges from 0.5 pixels to 0.25 pixels. The error compensation used in this study can reduce the error of punching position caused by running a production for several hours. The proposed system is capable of satisfying the precision requirements of FPC punching.