陈超, 杨斌, 于东钰, 阴万宏, 宫经珠, 李辉, 王楠茜, 杨科. 激光损伤阈值自动测量装置及实验[J]. 应用光学, 2023, 44(4): 852-858. DOI: 10.5768/JAO202344.0403006
引用本文: 陈超, 杨斌, 于东钰, 阴万宏, 宫经珠, 李辉, 王楠茜, 杨科. 激光损伤阈值自动测量装置及实验[J]. 应用光学, 2023, 44(4): 852-858. DOI: 10.5768/JAO202344.0403006
CHEN Chao, YANG Bin, YU Dongyu, YIN Wanhong, GONG Jingzhu, LI Hui, WANG Nanxi, YANG Ke. Automatic measurement device of laser-induced damage threshold and its experiment[J]. Journal of Applied Optics, 2023, 44(4): 852-858. DOI: 10.5768/JAO202344.0403006
Citation: CHEN Chao, YANG Bin, YU Dongyu, YIN Wanhong, GONG Jingzhu, LI Hui, WANG Nanxi, YANG Ke. Automatic measurement device of laser-induced damage threshold and its experiment[J]. Journal of Applied Optics, 2023, 44(4): 852-858. DOI: 10.5768/JAO202344.0403006

激光损伤阈值自动测量装置及实验

Automatic measurement device of laser-induced damage threshold and its experiment

  • 摘要: 设计并搭建了一套1 064 nm、532 nm的双波长光学元件激光损伤阈值自动测量装置,用于光学元件膜层激光损伤阈值的自动化检测。装置主要由脉冲激光光源、光束参数诊断组件、损伤在线诊断组件、待测件扫描运动平台和控制系统组成。整个测量装置和测量过程由基于Labview编制的计算机综合测量软件自动控制,可实现损伤阈值在0.1 J/cm2~100 J/cm2能量密度范围内的自动测量,并利用该装置对1 064 nm增透膜和铝反射膜样品进行了测量,得到损伤阈值分别为27.09 J/cm2和3.21 J/cm2,相对不确定度分别为3.91%和5.61%。

     

    Abstract: A set of 1 064 nm and 532 nm automatic measurement device of laser-induced damage threshold (LIDT) of dual-wavelength optical elements was designed and constructed for automatic detection of LIDT of optical elements film. The device was mainly composed of pulsed laser light source, beam parameter diagnosis component, damage online diagnosis component, scanning motion platform for parts to be tested and control system. The whole measuring device and measurement process were automatically controlled by the computer integrated measuring software based on Labview, which could realize the automatic measurement of damage threshold in the range of energy density from 0.1 J/cm2~100 J/cm2, and the device was also used to measure the 1 064 nm antireflection film and aluminum reflection film samples. The results show that the damage thresholds are 27.09 J/cm2 and 3.21 J/cm2, with a relative uncertainty of 3.91% and 5.61%, respectively.

     

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