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激光损伤阈值自动测量装置及实验

陈超 杨斌 于东钰 阴万宏 宫经珠 李辉 王楠茜 杨科

陈超, 杨斌, 于东钰, 阴万宏, 宫经珠, 李辉, 王楠茜, 杨科. 激光损伤阈值自动测量装置及实验[J]. 应用光学.
引用本文: 陈超, 杨斌, 于东钰, 阴万宏, 宫经珠, 李辉, 王楠茜, 杨科. 激光损伤阈值自动测量装置及实验[J]. 应用光学.
CHEN Chao, YANG Bin, YU Dongyu, YING Wanhong, GONG Jinzhu, Li Hui, WANG Lanxi, Yang Ke. Automated Measurement Setup of Laser-induced Damage Threshold and Its Experiment[J]. Journal of Applied Optics.
Citation: CHEN Chao, YANG Bin, YU Dongyu, YING Wanhong, GONG Jinzhu, Li Hui, WANG Lanxi, Yang Ke. Automated Measurement Setup of Laser-induced Damage Threshold and Its Experiment[J]. Journal of Applied Optics.

激光损伤阈值自动测量装置及实验

基金项目: 技术基础项目(JSJL2019208A004)
详细信息
    作者简介:

    陈超(1980-),男,重庆开州人,汉族,博士,高级工程师,主要从事光学计量测试技术研究。Email:cyrus8081@163.com

  • 中图分类号: TN248

Automated Measurement Setup of Laser-induced Damage Threshold and Its Experiment

  • 摘要: 设计并搭建了一套1 064 nm、532 nm的双波长光学元件激光损伤阈值自动测量装置,用于光学元件膜层激光损伤阈值的自动化检测。装置主要由脉冲激光光源、光束参数诊断组件、损伤在线诊断组件、待测件扫描运动平台和控制系统组成。整个测量装置和测量过程由基于Labview编制的计算机综合测量软件自动控制,可实现损伤阈值在0.1 J/cm2~100 J/cm2能量密度范围内的自动测量,并利用该装置对1 064 nm增透膜和铝反射膜样品进行了测量,得到损伤阈值分别为27.09 J/cm2和3.21 J/cm2,相对不确定度分别为3.91%和5.61%。
  • 图  1  1-on-1的测量方法

    Fig.  1  ISO 1-on-1 test method

    图  2  S-on-1测量方法

    Fig.  2  ISO S-on-1 test method

    图  3  R-on-1测量方法

    Fig.  3  R-on-1 test method

    图  4  双波长激光损伤阈值测试装置

    Fig.  4  Schematic of the dual wavelength laser damage threshold test setup

    图  5  双波长激光损伤阈值测试装置

    Fig.  5  The dual wavelength laser damage threshold test setup

    图  6  光束诊断系统原理图

    Fig.  6  Schematic of laser beam parameters measurement setup

    图  7  在线损伤探测系统

    Fig.  7  Damage detection system by online microscopy

    图  8  损伤阈值测试软件用户界面

    Fig.  8  The graphical user interface of LIDT measurement software

    图  9  损伤几率图

    Fig.  9  Damage probability curve

    图  10  1 064 nm激光辐照下铝反射膜和增透膜损伤形貌

    Fig.  10  The images of laser-induced damages to HR coat and AR coat

    表  1  损伤阈值测量结果

    Table  1  Measurement result of LIDT

    波长/nm样品名称LIDT/(J/cm2)
    1 on 1100 on 1R on 1
    1 064铝反射膜3.21——2.97
    增透膜27.09——25.93
    532铝反射膜0.56——0.32
    增透膜6.424.556.38
    下载: 导出CSV

    表  2  能量密度不确定度分析

    Table  2  Uncertainty analysis of laser energy density

    测量不确定度激光能量密度/%
    激光能量计测量相对不确定度(u1)1.25
    分光比测量相对不确定度(u2)0.18
    光斑有效面积测量[16](u3)1.1
    能量密度计算相对合成不确定度(u4)1.67
    下载: 导出CSV
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  • 网络出版日期:  2022-09-21

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