激光损伤阈值自动测量装置及实验

陈超; 杨斌; 于东钰; 阴万宏; 宫经珠; 李辉; 王楠茜; 杨科

激光损伤阈值自动测量装置及实验

西安应用光学研究所，陕西西安 710065

基金项目: 技术基础项目（JSJL2019208A004）

详细信息

作者简介:
陈超（1980-），男，重庆开州人，汉族，博士，高级工程师，主要从事光学计量测试技术研究。Email：cyrus8081@163.com

中图分类号: TN248
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出版历程
- 网络出版日期: 2022-09-21

Automated Measurement Setup of Laser-induced Damage Threshold and Its Experiment

Xi'an Institute of Applied Optics, Xi'an, Shaanxi 710065, China

摘要

摘要: 设计并搭建了一套1 064 nm、532 nm的双波长光学元件激光损伤阈值自动测量装置，用于光学元件膜层激光损伤阈值的自动化检测。装置主要由脉冲激光光源、光束参数诊断组件、损伤在线诊断组件、待测件扫描运动平台和控制系统组成。整个测量装置和测量过程由基于Labview编制的计算机综合测量软件自动控制，可实现损伤阈值在0.1 J/cm²～100 J/cm²能量密度范围内的自动测量，并利用该装置对1 064 nm增透膜和铝反射膜样品进行了测量，得到损伤阈值分别为27.09 J/cm²和3.21 J/cm²，相对不确定度分别为3.91%和5.61%。
- 自动测量 /
- 激光损伤阈值 /
- 1-on-1 /
- 能量密度 /
- 相对测量不确定度
Abstract: An automated measurement setup of laser-induced damage threshold (LIDT) according to ISO 21254-1,2,3,4:2011 standards is presented. The main blocks of the setup, include pulse laser system, laser beam parameters measurement system, damage detection system, specimen holder and control system, are described. In order to control the LIDT measurements, software based on LabView programming package was created. Energy density of 0.1 J/cm²～100 J/cm² is achieved. LIDT using the 1-on-1 test on 1064 nm AR coatings and Al reflective coatings on K9 substrates are respectively 27.09 J/cm² and 3.21 J/cm², relative measurement uncertainty are respectively 3.91% and 5.61%.
- automated measurement /
- LIDT /
- 1-on-1 /
- energy density /
- relative measurement uncertainty

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图 1 1-on-1的测量方法

Fig. 1 ISO 1-on-1 test method

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图 2 S-on-1测量方法

Fig. 2 ISO S-on-1 test method

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图 3 R-on-1测量方法

Fig. 3 R-on-1 test method

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图 4 双波长激光损伤阈值测试装置

Fig. 4 Schematic of the dual wavelength laser damage threshold test setup

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图 5 双波长激光损伤阈值测试装置

Fig. 5 The dual wavelength laser damage threshold test setup

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图 6 光束诊断系统原理图

Fig. 6 Schematic of laser beam parameters measurement setup

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图 7 在线损伤探测系统

Fig. 7 Damage detection system by online microscopy

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图 8 损伤阈值测试软件用户界面

Fig. 8 The graphical user interface of LIDT measurement software

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图 9 损伤几率图

Fig. 9 Damage probability curve

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图 10 1 064 nm激光辐照下铝反射膜和增透膜损伤形貌

Fig. 10 The images of laser-induced damages to HR coat and AR coat

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表 1 损伤阈值测量结果

Table 1 Measurement result of LIDT

波长/nm	样品名称	LIDT/(J/cm²)
波长/nm	样品名称	1 on 1	100 on 1	R on 1
1 064	铝反射膜	3.21	——	2.97
1 064	增透膜	27.09	——	25.93
532	铝反射膜	0.56	——	0.32
532	增透膜	6.42	4.55	6.38

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表 2 能量密度不确定度分析

Table 2 Uncertainty analysis of laser energy density

测量不确定度	激光能量密度/%
激光能量计测量相对不确定度(u₁)	1.25
分光比测量相对不确定度(u₂)	0.18
光斑有效面积测量^[16](u₃)	1.1
能量密度计算相对合成不确定度(u₄)	1.67

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