矩形波宽带通滤光膜研究

董莹; 张艳茹; 胡荣; 刘永强; 杨崇民

doi:10.5768/JAO202344.0105002

矩形波宽带通滤光膜研究

doi: 10.5768/JAO202344.0105002

董莹^1,,
张艳茹^2, ,,
胡荣¹,
刘永强¹,
杨崇民¹

1.
西安应用光学研究所，陕西西安 710065
2.
北京科益虹源光电技术有限公司，北京 102605

详细信息

作者简介:
董莹（1987—），男，博士，主要从事光学工艺及光学设计研究。E-mail：dy3284@126.com

通讯作者:
张艳茹（1988—），女，硕士，主要从事光学系统设计与机器光学工艺研究。E-mail：1032671324@qq.com

中图分类号: TN305.8;O484.4
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- 文章访问数: 109
- HTML全文浏览量: 75
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- 被引次数: 0
出版历程
- 收稿日期: 2022-02-08
- 修回日期: 2022-03-08
- 网络出版日期: 2022-08-05
- 刊出日期: 2023-01-17

Research on rectangular-wave broadband pass filter film

1.
Xi'an Institute of Applied Optics, Xi'an 710065, China
2.
Beijing RSLaser Opto-Electronics Technology Co.,Ltd., Beijing 102605, China

摘要

摘要: 对矩形波宽带通滤光片进行了深入研究，提出了一种设计、制备矩形波宽带通滤光片的方法。使用该方法设计并制备了400 nm~1100 nm波段，中心波长λ₀=515 nm，透射带λ=λ₀±25 nm，透射带平均透射率$\bar \tau $≥92%，截止带λ=400 nm~475 nm、λ=555 nm~1 100 nm，截止带透射率小于0.1%的矩形波宽带通OD3-A滤光片。对样片光谱进行了测试，结果满足需求。该方法设计、制备矩形波宽带通滤光片克服了F-P型窄带滤光膜监控精度要求高、通带宽带窄、成本高以及传统长、短波截止膜组合方式膜层总厚度过大、通带透过率低、波形矩形度差的缺点。
- 光学薄膜 /
- 带通滤光膜 /
- 矩形波 /
- 吸光性
Abstract: A method for designing and preparing the rectangular-wave broadband pass filter was put forward after a deep study. A rectangular-wave OD3-A broadband pass filter was designed and prepared with this method, with its center wavelength λ₀=515 nm in the working range of 400 nm~1 100 nm. And the mean transmittance of the sample in its pass-band of λ₀±25 nm was great than or equal to 92.7%, meanwhile the transmittance in the cut-off band λ ranging from 400 nm~475 nm and λ ranging from 555 nm~1 100 nm was less than 0.1%. The transmittance of the thin film sample was tested, and the spectrum met the requirements. The rectangular-wave broadband pass filter designed and prepared by this method overcame the disadvantages of high precision requirements of Fabry-Perot interferometer narrow-band filter film monitoring, narrow pass-band broadband, high cost, overlarge total thickness, low pass-band transmittance and poor waveform rectangularity in the traditional combination way of long and short wave cut-off films.
- optical thin film /
- band-pass filter film /
- rectangular wave /
- optical density

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图 1 高折射率材料Ti₂O₃的折射率曲线

Fig. 1 Refractive index curve of high refractive index material of Ti2O3

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图 2 带通膜面模拟透过率曲线

Fig. 2 Simulated transmittance curve of band-pass films surface

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图 3 长波截止膜面模拟透过率曲线

Fig. 3 Simulated transmittance curve of long-wave cutoff films surface

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图 4 宽带通滤光片模拟透射率曲线

Fig. 4 Simulated transmittance curve of broad-band pass filter

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图 5 带通膜面的实测透过率曲线

Fig. 5 Measured transmittance curve of band-pass films surface

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图 6 长波截止膜面的实测透过率曲线

Fig. 6 Measured transmittance curve of long-wave cutoff films surface

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图 7 最终样片的实测透过率曲线

Fig. 7 Measured transmittance curve of final sample piece

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