基于PDMS薄膜的等离子体光栅仿真分析

陈壮壮; 王志斌; 李克武; 吴笑男

基于PDMS薄膜的等离子体光栅仿真分析

中北大学理学院山西省光电信息与仪器工程技术研究中心，山西太原 030051

基金项目: 国家自然科学基金（61505179）；山西省青年科学基金（201901D211234）

详细信息

作者简介:
陈壮壮（1997−），女，硕士研究生，主要从事光栅方面的研究。E-mail：1542312637@qq.com

通讯作者:
王志斌（1966−），男，硕士，教授，主要从事光电信息物理、测试计量技术及仪器、光电子技术与仪器、光学工程等方面的研究。E-mail：wangzhibin@nuc.edu.cn

中图分类号: TN256
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出版历程
- 收稿日期: 2020-07-08
- 修回日期: 2020-09-25

Simulation analysis of plasma grating based on PDMS film

Shanxi Photoelectric Information and Instrument Engineering Technology Research Center, School of Science, North University of China, Taiyuan 030051, China

摘要

摘要: 为了实现对等离子体光栅共振波长的测量，研究光栅参数对应力的响应敏感程度，提出了一种新型的应力敏感型聚二甲基硅氧烷(PDMS)薄膜等离子体光栅。利用时域有限差分法(FDTD)原理，建立了一种周期性等离子体光栅结构仿真模型。借助周期边界条件，通过对光栅施加应力，改变等离子体光栅参数(即周期、占空比及Au膜厚度)来实现共振波长的测量，研究光栅参数对力的响应敏感程度；并将仿真结果与理论值相比较得出相对误差。结果表明，当光栅周期为0.7 μm，占空比为55%，金膜厚度为0.02 μm时，此时对力的响应最敏感；其次，将仿真所得不同周期时的共振波长与理论值相比较可知二者结果相吻合；周期为0.7 μm时，共振峰的波长为1.251 μm，理论与仿真所得相对误差都小于2%，结果较为准确。此方法在单色仪、光谱仪和传感等领域中具有重要作用。
- 表面等离子体共振 /
- 聚二甲基硅氧烷 /
- 时域有限差分法 /
- 透过率 /
- 应力
Abstract: In order to measure the resonance wavelength of plasma grating, the sensitivity of grating parameters to stress is studied, a new type of stress-sensitive polydimethylsiloxane (PDMS) thin film plasma grating is proposed. Based on the principle of finite difference time domain (FDTD), a simulation model of periodic plasma grating structure is established. With the help of periodic boundary conditions, by applying stress to the grating and changing the parameters of the plasma grating (i.e. period, duty cycle and Au film thickness) to achieve the measurement of the resonance wavelength, the sensitivity of the grating parameters to the force is studied; and compare the simulation result with the theoretical value to get the relative error. The relative error is calculated by comparing the simulation result with the theoretical value. The results show that when the grating period is 0.7 μm, the duty cycle is 55%, and the gold film thickness is 0.02 μm, the response to force is most sensitive at this time; Secondly, comparing the resonance peak wavelength at different periods obtained by simulation with the theoretical calculation value, the results of the two are consistent; When the period is 0.7 μm, the wavelength of the resonance peak is 1.251 μm, and the relative error obtained by theory and simulation is less than 2%, and the result is more accurate. This method plays an important role in the fields of monochromator, spectrometer and sensor.
- surface plasmon resonance /
- polydimethylsiloxane(PDMS) /
- finite-difference time-domain method /
- transmittance /
- stress

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图 1 光栅耦合模型

Fig. 1 Grating coupling model

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图 2 光栅结构示意图

Fig. 2 Schematic diagram of grating structure

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图 3 不同周期的共振谱

Fig. 3 Resonance spectra of different periods

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图 4 共振波长与周期的变化关系

Fig. 4 The relationship between resonance wavelength and period

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图 5 不同金膜厚度的共振谱

Fig. 5 Resonance spentrum of different gold film thickness

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图 6 共振波长和金膜厚度的变化关系

Fig. 6 The relationship between resonance wavelength and gold film thickness

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图 7 不同占空比的共振谱

Fig. 7 Resonance spentrum of different duty ratio

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图 8 共振波长和占空比的变化关系

Fig. 8 The relationship between resonance wavelength and duty ratio

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