基于熔石英宽光谱增透的双面微纳结构设计与制备

    Design and Fabrication of Double-Sided Micro-Nano Structures for Broadband Antireflection on Fused Silica

    • 摘要: 针对熔石英光学窗口在宽光谱范围内界面反射损耗较大的问题,提出一种基于双面仿生蛾眼亚波长微纳结构的宽光谱增透方法。基于有效介质理论与有限元方法,建立了双面六方周期圆柱结构模型,分析了结构高度对等效折射率分布、电场分布及宽光谱透过率的影响机制。采用位移泰伯光刻结合感应耦合等离子体刻蚀技术,在熔石英双面制备了高度约为200 nm和350 nm的圆柱微纳结构。仿真与实验结果表明,双面亚波长结构能够在空气—石英界面形成渐变折射率层,有效降低菲涅耳反射,提升宽光谱透过率。其中,高度为200 nm的结构在500~700 nm可见光波段透过率超过95%,高度为350 nm的结构在800~1300 nm近红外波段透过率超过95%。研究表明,结构高度影响折射率渐变层厚度及光场调控能力,可实现不同波段的增透优化,为宽光谱熔石英光学窗口的设计提供了理论依据与工艺参考。

       

      Abstract: To address the issue of considerable interfacial reflection loss of fused silica optical windows over a broad spectral range, a broadband antireflection method based on double-sided biomimetic moth-eye subwavelength micro-nanostructures was proposed. A double-sided hexagonal periodic cylindrical structure model was established based on effective medium theory and the finite element method. The effects of structural height on the equivalent refractive index distribution, electric field distribution, and broadband transmittance were analyzed. Cylindrical micro-nanostructures with heights of approximately 200 nm and 350 nm were fabricated on both sides of fused silica substrates using displacement Talbot lithography combined with inductively coupled plasma etching. Both simulation and experimental results demonstrate that the double-sided subwavelength structures can form a graded refractive index layer at the air-silica interface, by which Fresnel reflection is effectively reduced and broadband transmittance is enhanced. Specifically, a transmittance exceeding 95% was achieved in the visible band of 500 nm~700 nm for the 200 nm-high structures, and a transmittance exceeding 95% was obtained in the near-infrared band of 800 nm~1300 nm for the 350 nm-high structures. It is revealed that the structural height affects both the thickness of the refractive index gradient layer and the light-field modulation capability, by which antireflection optimization for different spectral bands can be realized. This work provides a theoretical basis and a processing reference for the design of broadband fused silica optical windows.

       

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