Abstract: In the precision optics process, diamond grinding wheel is widely used for precision grinding of various hard and brittle materials. In order to improve the surface quality and sub-surface damage of the optical parts, great efforts were made in improving the manufacture of diamond grinding wheel and the grinding process of various brittle optical materials. The structure, fixing mode, combined material and main body of diamond grinding wheels were summarized. The static balancing and dynamic balancing of diamond grinding wheel were analyzed. Ultra precision grinding element with Rt1 m, Ra＜0.3 m was manufactured with this method. It is proved that this method can significantly improve the efficiency of following process.