Shack-Hartmann波前传感器在光学检验中的应用

李宏壮, 王志臣, 刘欣悦, 卫沛峰, 明名, 孟浩然

李宏壮, 王志臣, 刘欣悦, 卫沛峰, 明名, 孟浩然. Shack-Hartmann波前传感器在光学检验中的应用[J]. 应用光学, 2012, 33(1): 134-138.
引用本文: 李宏壮, 王志臣, 刘欣悦, 卫沛峰, 明名, 孟浩然. Shack-Hartmann波前传感器在光学检验中的应用[J]. 应用光学, 2012, 33(1): 134-138.
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LI Hong-zhuang, WANG Zhi-chen, LIU Xin-yue, WEI Pei-feng, MING Ming, MENG Hao-ran. Application of Shack-Hartmann wavefront sensor in optical testing[J]. Journal of Applied Optics, 2012, 33(1): 134-138.
Citation: LI Hong-zhuang, WANG Zhi-chen, LIU Xin-yue, WEI Pei-feng, MING Ming, MENG Hao-ran. Application of Shack-Hartmann wavefront sensor in optical testing[J]. Journal of Applied Optics, 2012, 33(1): 134-138.
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Shack-Hartmann波前传感器在光学检验中的应用

  • 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033

详细信息
    通讯作者:

    李宏壮(1980-)，男，黑龙江巴彦人，博士，副研究员，主要从事光学设计、光学检测、大口径望远镜主动光学及波前探测技术。

  • 中图分类号: TN206;TH751

Application of Shack-Hartmann wavefront sensor in optical testing

  • Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China

摘要

    摘要
  • 摘要: 介绍用于光学检测的Shack-Hartmann(S-H)波前传感器，以及相应的检测实验结果。在实验室内，通过与Zygo干涉仪的测量结果对比，得出传感器的测量精度优于/50 RMS(=632.8 nm)。在外场利用星光作为光源，对口径1 m、焦距11 m的望远镜进行了系统波像差检验，测量结果为0.39~0.46RMS之间，并随着俯仰角的增加而增大，主要像差形式为三阶像散。
    Abstract: Shack-Hartmann (S-H) wavefront sensors were developed for optical test and the corresponding experiment results are introduced. In the laboratory, the test results were compared with Zygo interferometer, which showed that the accuracy of the S-H sensor was better than /50 RMS. And using star as light source, the wavefront error of the telescope with 1m diameter and 11m focal length was tested through the S-H sensor. The results show that the wavefront error of the telescope is about 0.39~ 0.46 RMS, and the error inceases as the elevation angle of the telescope increases. The dominating wave-front error is 3rd astigmatism.
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    • 参考文献(1)
  • ［1］CURATU C, CURATU G,ROLLAND J. Fundamental and specific steps in Shack-Hartmann wavefront sensor design ［J］. SPIE,2006, 6288:1-8.
    ［2］NEAL D R, COPLAND J,NEAL D. Shack-Hartmann wavefront sensor precision and accuracy［J］. SPIE, 2002, 4779:148-160.
    ［3］NEAL D R, PULASKI P,RAYMOND T D, et al.. Testing highly aberrated large optics with a Shack-Hartmann wavefront sensor ［J］. SPIE, 2003,5162: 1-10.
    ［4］NEAL D R, D. J. ARMSTRONG, TURNER W T. Wavefront sensors for control and process monitoring in optics manufacture ［J］. SPIE,1997,2993:211-220.
    ［5］李宏壮, 王建立,林旭东,等, 薄反射镜主动光学实验系统［J］. 光电工程，2009，36(6):120-126.
    LI Hong-zhuang, WANG Jian-li, LIN Xu-dong, et al. Active optics experiment system with thin-mirror ［J］. OptoElectronic Engineering, 2009，36(6):120-126. (in Chinese with an English abstract)
    ［6］周文超，彭勇，徐宏来. 大口径光学系统综合像差外场检测的方法［J］. 红外与激光工程，2008, 37(增刊) :155-157.
    ZHOU Wen-chao, PENG Yong, XU Hong-lai. Way to get integrative aberration of large aperture optical system in the outfield［J］. Infrared and Laser Engineering, 2008，37(sup):155-157. (in Chinese with an English abstract)
    ［7］李宏壮, 刘欣悦, 王建立. 薄镜面面形主动校正技术研究［J］. 应用光学, 2010, 31(1):118-123.
    LI Hong-zhuang, LIU Xin-yue, WANG Jian-li, Active correction technology research of thin-mirror surface［J］. Journal of Applied Optics, 2010，31(1):118-123. (in Chinese with an English abstract)
    ［8］常山，曹益平，陈永权.五角棱镜的光束转向误差对波前测量的影响［J］. 应用光学, 2006, 27(3):186-191.
    CHANG Shan, CAO Yi-ping, CHEN Yong-quan, Influence of beam turning error of pentagonal prism on wave-front measurement ［J］.Journal of Applied Optics, 2006, 27(3):186-191.(in Chinese with an English abstract)
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出版历程
  • 刊出日期:  2012-02-14

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