非零位检测凸非球面反射镜的研究

王孝坤

非零位检测凸非球面反射镜的研究

王孝坤^,

中国科学院长春光学精密机械与物理研究所,吉林长春130033

详细信息

通讯作者:
王孝坤(1980-)，男，江苏丹阳人，副研究员,博士，主要从事光学超精加工和检测技术研究。

中图分类号: O436.1；TQ171.65
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- 刊出日期: 2012-02-14

Measurement of convex aspheric mirror by non-null testing

WANG Xiao-kun^,

Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China

摘要

摘要: 在简要总结各种检测凸非球面方法优缺点的基础上，提出了利用部分补偿法和子孔径拼接干涉检测凸非球面的新方法。分别研究和分析了这两种非零位检测非球面方法的基本原理和基础理论；设计并制作了部分补偿器件，并对其系统误差进行了标定；开发了综合优化和误差均化的子孔径拼接算法；设计并研制了两种方法都适用的检测装置。并结合实例对一口径为130 mm的碳化硅凸非球面分别进行了部分补偿检测和子孔径拼接测量，这两种方法测量所得的全口径面形分布是一致的，其PV值和RMS值的偏差仅为0.010 和 0.002 (=0.632 8 m)。从而提供了两种非零位补偿测试凸非球面的手段。
- 非零位检测 /
- 部分补偿 /
- 子孔径拼接干涉 /
- 凸非球面 /
- 零位补偿
Abstract: Conventional testing methods for convex aspheric surfaces were briefly reviewed, and two novel methods for testing convex asphere by partial compensation method and sub-aperture stitching interferometry (SSI) were proposed. The basic principle and theory of the two methods were investigated. The partial compensator was designed and customized, the system error of the partial compensator was calibrated, and the synthetical optimization stitching model and the effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The prototype and setup for testing of convex asphere by the non-null testing were developed. A convex SiC asphere with the aperture of 130 mm was tested by the two methods respectively. The results show that the difference of PV and RMS error between SSI and partial compensation is 0.010 and 0.002 respectively, the full aperture surface maps of the two methods are consistent and it provides two non-null testing methods for measuring convex aspheric surfaces.
- non-null testing /
- partial compensation /
- SSI /
- convex asphere /
- null compensation

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参考文献(1)

［1］ZHANG Xue-jun, ZHANG Zhong-yu, LI Zhi-lai. Manufacturing and testing of 1-m class SiC aspherical mirror［J］. SPIE,2007, 6721: 672109-1-672109-5.
［2］MALACARA D. Optical shop testing［M］. New York: J.Wiley&Sons, 1992.

［3］WALKER D D, BEAUCAMP A T H, BINGHAM R G. The precessions process for efficient production of aspheric optics for large telescopes and their instrumentation［J］. SPIE, 2003, 4842: 73-84.
［4］潘君骅.光学非球面的设计、加工和检验［M］.北京：科学出版社，1994.
PAN Jun-hua.Design, fabrication and testing of optical aspheres ［M］. Beijing：Science Press，1994.(in Chinese)
［5］GUO Pei-ji , YU Jing-chi . Design and certification of a null corrector to test hyperboloid convex mirror ［J］. SPIE, 2006, 6150: 259-263.
［6］薛栋林，张忠玉，郑立功，等. 大口径碳化硅材料凸非球面反射镜的检验［J］.光学精密工程，2008,16(12):2491-2496.
XUE Dong-lin, ZHANG Zhong-yu, ZHENG Li-gong, et al. Testing methods for large aperture convex SiC asphere mirror ［J］. Optics and Precision Engineering, 2008,16(12):2491-2496. (in Chinese with an English abstract )
［7］BURGE J H, ANDERSON D S. Full-aperture interferometric test of convex secondary mirrors using holographic test plates ［J］. SPIE, 1994, 2199: 181-190.
［8］QI Yue-jing, WANG Ping, XIE Jing-hui. A novel method of measuring convex aspheric lens using hologram optical elements［J］. SPIE, 2005, 6024: 60241F-1-60241F-7.

［9］王孝坤, 王丽辉,张学军,等.子孔径拼接法检测非球面［J］.光学精密工程，2007，15（2）: 527-532.
WANG Xiao-kun, WANG Li-hui , ZHANG Xue-jun, et al.Testing asphere by subaperture stitching interferometric method［J］. Optics and Precision Engineering, 2007,15(2):192-198. (in Chinese with an English abstract)
［10］WANG Xiao-kun , ZHENG Li-gong , ZHANG Bin-zhi , et al. Test of an off-axis asphere by subaperture stitching interferometry［J］. SPIE, 2009, 7283: 72832J-1- 72832J-6.

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文章访问数: 3188
HTML全文浏览量: 108
PDF下载量: 552
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非零位检测凸非球面反射镜的研究

通讯作者:
王孝坤(1980-)，男，江苏丹阳人，副研究员,博士，主要从事光学超精加工和检测技术研究。

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Measurement of convex aspheric mirror by non-null testing

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非零位检测凸非球面反射镜的研究

通讯作者: 王孝坤(1980-)，男，江苏丹阳人，副研究员,博士，主要从事光学超精加工和检测技术研究。

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Measurement of convex aspheric mirror by non-null testing

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通讯作者:
王孝坤(1980-)，男，江苏丹阳人，副研究员,博士，主要从事光学超精加工和检测技术研究。