High reflectance and high transmittance measurement for optical elements
-
摘要: 为了实现光学元件、光学薄膜等高反射比、高透射比的测量，以单次反射测量法为基础，并结合激光稳功率技术、双光路测量技术以及精密探测技术，建立了一套精密测试系统，实现对光学元件632.8 nm和1 064 nm两个波长下高反射比与高透射比的测量。实验和测量不确定度分析验证测试系统在632.8 nm波长下高反射比与高透射比的测量不确定度优于0.008%，在1 064 nm波长下高反射比与高透射比的测量不确定度优于0.015%。Abstract: In order to measure high reflectance and high transmittance of optic components and coat films, a precise measurement facility was set up which was based on single reflection measurement using laser power-stabilized technique, double optical path measurement technique and precise detection technique. High reflectance and high transmittance were measured at 632.8 nm and 1 064 nm wavelengths on the facility. Experiment result and uncertainty analysis showed that the measurement uncertainty of high reflectance and high transmittance was less than 0.008% at 632.8 nm and was less than 0.015% at 1 064 nm.
-
Keywords:
- high reflectance /
- high transmittance /
- trap detector /
- integrating sphere detector
-
-
［1］盛新志，孙福革，白吉玲，等. 复合衰荡光腔技术精确检测COIL腔镜高反射率［J］.强激光与粒子束，1998，10（2）：100-202.
SHENG Xin-zhi， SUN Fu-ge， BAI Ji-ling. Precise measurement of COIL mirror-s reflectivity by novel CRDS［J］. High Power Laser and Particle Beams， 1998， 10（2）：100-202.(in Chinese with an English abstract)
［2］孙福革，戴东旭，解金春，等. 用光腔衰荡光谱法精确测量高反射镜的反射率［J］.中国激光，1999，26（1）：35-38.
SUN Fu-ge， DAI Dong-xu， XIE Jin-chun. Accurate reflectivity measurement of high reflective mirrors via a cavity ring -down spectroscopy［J］. Chinese Journal of Lasers， 1999， 26（1）：35-38. (in Chinese with an English abstract)
［3］赵宏太，柳晓军，詹明生. 腔衰荡法四腔镜反射率及腔内吸收测量［J］.量子电子学报，2001，18(3):213-216.
ZHAO Hong-tai， LIU Xiao-jun， ZHAN Ming-sheng. Measurement of four cavity mirrors reflectivity and absorption of the cavity with cavity ring -down spectroscopy［J］. Chinese Journal of Quantum Electronics， 2001， 18(3)：213-216. (in Chinese with an English abstract)
［4］赵宏太，柳晓军，王瑾，等. 用光腔衰荡测定腔镜及镜片的反射率［J］.光电子·激光，2001，12(1)：71-73.
ZHAO Hong-tai， LIU Xiao-jun， Wang Jin,et al. Reflectivity measurement of cavity mirrors and reflective mirrors by cavity ring -down spectroscopy［J］. Chinese Journal of Photoelectrons·Lasers， 2001， 12(1)：71-73. (in Chinese with an English abstract)
［5］李斌成，龚元. 光腔衰荡高反射率测量技术综述［J］.激光与光电子学进展，2010，47：1-11.
LI Bin-cheng, GONG Yuan. Introduction of high reflectivity measurement technique by cavity ring -down spectroscopy［J］. Journal of Laser and Optics and Electronics Development， 2010， 47：1-11. (in Chinese with an English abstract)
［6］刘蓉，李峰，白晋涛. 光腔衰荡测量高反射率的实验研究［J］.光学与光电子技术，2008，6：11-14.
LIU Rong， LI Feng， BAI Jin-tao. Test researchment of high reflectivity measurement by cavity ring -down spectroscopy［J］. Optics and Optoelectronic Technology, 2008， 6：11-14. (in Chinese with an English abstract)
［7］龚元，李斌成. 宽光谱连续波复合衰荡光腔技术测量高反射率［J］.中国激光，2007，34（6）：857-860.
GONG Yuan， LI Bin-cheng. High reflectivity measurement by broadband spectrum CW combination cavity ring -down spectroscopy［J］. Chinese Journal of Lasers，2007，34（6）：857-860. (in Chinese with an English abstract)
［8］龚元，李斌成. 连续激光光腔衰荡法精确测量高反射率［J］.中国激光，2006，33（9）：1247-1250.
GONG Yuan， LI Bin-cheng. Accurate high reflectivity measurement via CW laser cavity ring -down spectroscopy［J］. Chinese Journal of Lasers， 2006， 33（9）：1247-1250. (in Chinese with an English abstract)
［9］ROMIINI D， KECHONOV A A， SAGLEGHI N， et al. CW cavity ring-down spectroscopy［J］. Chem Phys Lett， 1977， 264：316-321.
［10］杨照金，李燕梅，王芳，等. 国防光学计量测试的新进展［J］.应用光学，2001，22（4）：35-39.
YANG Zhao-jin， LI Yan-mei， WANG Fang, et al.New development of optical metrology for national defence［J］. Journal of Applied Optics， 2001， 22（4）：35-39. (in Chinese with an English abstract)
计量
- 文章访问数: 2874
- HTML全文浏览量: 104
- PDF下载量: 578
下载:
陕公网安备 61011302001501号 