High reflectance and high transmittance measurement for optical elements
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摘要: 为了实现光学元件、光学薄膜等高反射比、高透射比的测量，以单次反射测量法为基础，并结合激光稳功率技术、双光路测量技术以及精密探测技术，建立了一套精密测试系统，实现对光学元件632.8 nm和1 064 nm两个波长下高反射比与高透射比的测量。实验和测量不确定度分析验证测试系统在632.8 nm波长下高反射比与高透射比的测量不确定度优于0.008%，在1 064 nm波长下高反射比与高透射比的测量不确定度优于0.015%。Abstract: In order to measure high reflectance and high transmittance of optic components and coat films, a precise measurement facility was set up which was based on single reflection measurement using laser power-stabilized technique, double optical path measurement technique and precise detection technique. High reflectance and high transmittance were measured at 632.8 nm and 1 064 nm wavelengths on the facility. Experiment result and uncertainty analysis showed that the measurement uncertainty of high reflectance and high transmittance was less than 0.008% at 632.8 nm and was less than 0.015% at 1 064 nm.
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Keywords:
- high reflectance /
- high transmittance /
- trap detector /
- integrating sphere detector
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