超广角大工作面f-theta镜头的光学设计

付敏敏, 陈培锋, 王英, 蒋红阳

付敏敏, 陈培锋, 王英, 蒋红阳. 超广角大工作面f-theta镜头的光学设计[J]. 应用光学, 2011, 32(6): 1083-1087.
引用本文: 付敏敏, 陈培锋, 王英, 蒋红阳. 超广角大工作面f-theta镜头的光学设计[J]. 应用光学, 2011, 32(6): 1083-1087.
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FU Min-min, CHEN Pei-feng, WANG Ying, JIANG Hong-yang. Optical design of super wide angle f-theta lens with large operation area[J]. Journal of Applied Optics, 2011, 32(6): 1083-1087.
Citation: FU Min-min, CHEN Pei-feng, WANG Ying, JIANG Hong-yang. Optical design of super wide angle f-theta lens with large operation area[J]. Journal of Applied Optics, 2011, 32(6): 1083-1087.
shu

超广角大工作面f-theta镜头的光学设计

  • 华中科技大学 光电子科学与工程学院,湖北 武汉 430074

详细信息
    通讯作者:

    付敏敏（1985-），男，江西新余人,硕士研究生，主要从事光学设计、光电检测方面的研究。

  • 中图分类号: TN202；TH703

Optical design of super wide angle f-theta lens with large operation area

  • Department of Optoelectronic Science and Engineering,Huazhong University of Science &Technology,Wuhan 430074,China

摘要

    摘要
  • 摘要: 目前国内用于激光标刻机的f-theta镜头的视场角一般小于60。采用望远镜结构，利用视觉放大率增大视场角，得到了超广角90镜头。该方法具有简洁、可靠、易实现等特点。通过初级像差分析，确定系统的初级结构参数，利用ZEMAX软件优化得到了大工作面为285 mm的f-theta镜头，镜头线性畸变误差值不超过1 %，在半径为698 m的圆内，能量集中度为80%，聚焦性能接近衍射极限。
    Abstract: The field angle of f-theta lens used in laser marking system is generally less than 60. By adopting a telescope structure and using a method of visual magnification, a super wide lens with the field angle of 90was obtained in the optical system. The method is simple, reliable, and easy to achieve. Based on the analysis of primary aberrations, the parameters of initial structure were determined, and the ftheta lens with a large working area of 285 mm in diameter was obtained by optimizing the initial structure with ZEMAX. The linear distortion error of the lens is less than 1%, the energy concentration rate is 80% in the circle with a radius of 698 m and the focusing performance is diffraction-limited.
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    • 参考文献(1)
  • ［1］崔桂华. 超广角大口径fθ透镜设计［J］. 应用光学, 1993,14(3):13-15.
     CUI Gui-hua. The design of super wide angle f-θ lens with large aperture［J］. Journal of Applied Optics, 1993,14(3):13-15. (in Chinese with an English abstract)
    ［2］季轶群, 沈为民. 大工作面f-Theta镜头的光学设计［J］. 光学学报, 2005,25(11),1539-1542.
    JI Yi-qun, SHEN Wei-min. Optical design of large working area f-theta lens［J］. Acta Optica Sinina, 2005,25(11),1539-1542. (in Chinese with an English abstract)
    ［3］王相京, 吴金才, 陈结祥, 等. 多波长、大工作面折-衍混杂f-θ镜头设计［J］.红外与激光工程, 2009,38(1):79-81.
    WANG Xiang-jing, WU Jin-cai, CHEN Jie-xiang, et al. Design of hybrid refractive-diffractive f-θ lens with multi-wavelength, large working area［J］. Infrared and Laser Engineering, 2009,38(1):79-81. (in Chinese with an English abstract)
    ［3］THIBAULT S. F-Sin(theta) lens system and application［J］. SPIE, 2001, 4441: 98-105.
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    ［5］李晓彤, 岑兆丰. 几何光学·像差·光学设计［M］. 杭州:浙江大学出版社,2003.
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    ［6］陈海清. 现代实用光学系统［M］. 武汉:华中科技大学出版社, 2003.
    CHEN Hai-qing. Mordern practical optical system［M］. Wuhan: Huazhong University of Science and Technology Press, 2003. (in Chinese)
    ［7］LAIKIN M. 光学系统设计［M］. 北京:机械工业出版社,2009.
    LAIKIN M. Lens design［M］. Beijing: Mechanic Industry Press,2009. (in Chinese)
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  • 刊出日期:  2011-11-14

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