Abstract: Based on the demands for high performance and green manufacture of microchannel plates (MCP), the development of alternative material to replace lead silicate glass MCP (LSG-MCP) has been intensively investigated. In the past 20 years, silicon MCP has achieved significant progress and become one of the most promising MCPs. The research progress on Si-MCP is summarized in substrate material, preparation, performance and application. The preparation of microporous array, the preparation principle and method of functional layer of microporous inner wall are discussed. Compared with the conventional LSG-MCP, the advantages and disadvantages of Si-MCP in preparation and performance were analyzed. Finally, the prospect of Si-MCP is presented for further development.