大粘度复合纳米材料面投影微立体光刻系统的分辨率研究

周庚侠; 班书宝; 孙天玉; 顾济华; 吴东岷

大粘度复合纳米材料面投影微立体光刻系统的分辨率研究

1.
苏州大学物理科学与技术学院,江苏苏州 215006;
2.
中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州 215125

详细信息

作者简介:
周庚侠（1977-），女，江苏南京人，硕士研究生，主要从事面投影微立体光刻系统的研究工作。

中图分类号: TN204
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出版历程
- 刊出日期: 2011-09-14

Resolution of micro-stereo-lithography system using high viscosity nanocomposites

1.
School of Physical Science and Technology,Soochow University,Suzhou 215006,China;
2.
Suzhou Institute of Nano-tech and Nano-bionics,CAS,Suzhou 215125,China

摘要

摘要: 基于数字微反射镜的动态掩膜面投影微立体光刻技术是一种基于快速原型制造思想的新型微细结构加工手段，其系统中常用树脂槽和涂覆装置使得其无法适用于粘度大的固化材料。为实现粘度大的复合纳米材料的固化制造，构建了新型的基于数字微反射镜技术的动态掩膜微立体光刻系统，该系统的加工横向分辨率由系统的光学分辨率与树脂特性共同决定。当单层树脂固化厚度超过临界值时，系统的横向分辨率将降低。根据实验中测量光学系统的分辨率以及树脂的工作曲线，得到本系统的最高横向分辨率可以达到14 m。
- 微立体光刻 /
- 分辨率 /
- 树脂化学响应 /
- 临界调制传递函数
Abstract: To fabricate microstructures using high viscosity composites, an integral stereo-lithography (SL) system adopting a digital micro-mirror device (DMD) as its dynamic mask was developed, which employed our novel resin vat and coating system. It shows that the lateral resolution of the SL system is determined by the optical resolution and the chemical response of the photo curable resin, the lateral resolution of the SL system is decreased as the curing depth goes beyond a critical value. The measured values of the optical system-s resolution and the resin-s working curve indicate that the maximum lateral resolution of the SL system is 14 m.
- micro-stereo-lithography /
- resolution /
- chemical response of resin /
- critical modulation transfer function

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参考文献(1)

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文章访问数: 3970
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大粘度复合纳米材料面投影微立体光刻系统的分辨率研究

作者简介:
周庚侠（1977-），女，江苏南京人，硕士研究生，主要从事面投影微立体光刻系统的研究工作。

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Resolution of micro-stereo-lithography system using high viscosity nanocomposites

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大粘度复合纳米材料面投影微立体光刻系统的分辨率研究

作者简介: 周庚侠（1977-），女，江苏南京人，硕士研究生，主要从事面投影微立体光刻系统的研究工作。

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Resolution of micro-stereo-lithography system using high viscosity nanocomposites

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出版历程

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相关数据库

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作者简介:
周庚侠（1977-），女，江苏南京人，硕士研究生，主要从事面投影微立体光刻系统的研究工作。