离子辅助沉积大口径传输反射镜面形控制研究

陈松林; 马平; 胡江川; 胡建平; 王震; 罗晋

离子辅助沉积大口径传输反射镜面形控制研究

成都精密光学工程研究中心,四川成都610041

详细信息

通讯作者:
陈松林(1975-)，男，四川德阳人，助研，硕士，主要从事新型薄膜设计和抗损伤激光薄膜的研究工作。

中图分类号: TN205; O484.1
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- 刊出日期: 2011-05-14

Surface shape control for large ion assisted deposition mirror

Chengdu Fine Optical Engineer Research Centre,Chengdu 610041,China

摘要

摘要: 针对大型激光系统中光束质量低和波前畸变等特点，采用离子辅助电子束蒸发技术成功实现对多层膜残余应力的精确控制。通过分析氧化铪、氧化硅单层膜残余应力变化规律，研究了离子源束压、束流参量对膜层折射率、残余应力性质及大小的影响。540 mm340 mm60 mm规格大口径传输反射镜面形PV值达到0.5(=632 nm)，小光束损伤测试情况下，样品元件的损伤阈值大于30 J/cm2(N-on-1,1 064 nm,5 ns)，利用该技术制备的大口径传输反射镜已获得成功应用。
- 薄膜光学 /
- 面形控制 /
- 离子辅助 /
- 反射镜 /
- 损伤阈值
Abstract: To improve wavefront quality in large scale laser, the residual stress in multi-layer films was controlled precisely by ion-assisted e-beam evaporation. Based on the analysis of the residual stress variation in single HfO2 layer and SiO2 layer, the effects of ion-source beam voltage and beam current on refractive index and residual stress in films were studied. The PV value of 540 mm340 mm60 mm reflective mirror was controlled below 0.5 (=632 nm). The damage threshold of the specimen tested with small-size beam was higher than 30 J/cm2 (N-on-1,1 064 nm, 5 ns). The large-size reflective mirror manufactured with this technology is applied successfully in a large aperture prototype device.
- film optics /
- surface shape control /
- ion assisted /
- refractive mirror /
- damage threshold

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参考文献(1)

［1］CAMPBELL J H, HAWLEY-FEDDER R A, STOLZ C J, et al. NIF optical materials and fabrication technologies: an overview［J］. SPIE, 2004, 5341: 84-101.

［2］TAMULEVICIUS S. Stress and strain in the vacuum deposited thin films［J］. Vacuum, 1998, 51(2): 127-139.

［3］ANZELLOTTI J F, SMITH D J, SCZUPAK R J, et al. Stress and environmental shift characteristics of HfO2/SiO2 multilayer coatings［J］. SPIE, 1997, 2966: 258-264.

［4］GEENEN L B, ROBIC J Y, PAULEAU Y, et al. Residual stresses in evaporated silicon dioxide thin films: correlation with deposition parameters and aging behavior［J］. Applied Physics, 1995, 78(2): 962-967.

［5］SHAO Shu-ying, FAN Zheng-xiu, SHAO Jian-da, et al. Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different temperatures and rates［J］. Thin Solid Films, 2003, 445(1): 59-62.

［6］WARD D J, ARNELL R D. Finite element modelling of stress development during deposition of ion assisted coatings［J］. Thin Solid Films, 2002, 420-421: 269-274.

［7］ZLLER A, GTZELMANN R, MATL K, et al. Plasma-ion-assisted deposition: investigation of film stress［J］. SPIE, 1996, 2776: 207-211.

［8］SCAGLIONE S, SARTO F, RIZZO A, et al. Dependence of the HfO2 thin film structure on the momentum transfer in ion beam assisted deposition［J］. SPIE, 1998, 3578: 154-161.
［9］孙乘伟, 陆启生, 范正修, 等. 激光辐照效应［M］. 北京: 国防工业出版社, 2002: 264-266.

SUN Cheng-wei, LU Qi-sheng, FAN Zheng-xiu, et al. Laser irradiation effect［M］. Beijing: National Defence Industry Press, 2002: 264-266. (in Chinese)

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文章访问数: 3685
HTML全文浏览量: 80
PDF下载量: 600
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离子辅助沉积大口径传输反射镜面形控制研究

通讯作者:
陈松林(1975-)，男，四川德阳人，助研，硕士，主要从事新型薄膜设计和抗损伤激光薄膜的研究工作。

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Surface shape control for large ion assisted deposition mirror

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离子辅助沉积大口径传输反射镜面形控制研究

通讯作者: 陈松林(1975-)，男，四川德阳人，助研，硕士，主要从事新型薄膜设计和抗损伤激光薄膜的研究工作。

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出版历程

Surface shape control for large ion assisted deposition mirror

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出版历程

目录

相关数据库

广告合作

友情链接

帮助中心

通讯作者:
陈松林(1975-)，男，四川德阳人，助研，硕士，主要从事新型薄膜设计和抗损伤激光薄膜的研究工作。