多电极静电拉伸薄膜反射镜的光学检测

钟兴, 金光, 张鹏, 张元

钟兴, 金光, 张鹏, 张元. 多电极静电拉伸薄膜反射镜的光学检测[J]. 应用光学, 2011, 32(2): 282-286.
引用本文: 钟兴, 金光, 张鹏, 张元. 多电极静电拉伸薄膜反射镜的光学检测[J]. 应用光学, 2011, 32(2): 282-286.
shu
ZHONG Xing, JIN Guang, ZHANG Peng, ZHANG Yuan. Optical testing of multi-electrode electrostatic membrane mirror[J]. Journal of Applied Optics, 2011, 32(2): 282-286.
Citation: ZHONG Xing, JIN Guang, ZHANG Peng, ZHANG Yuan. Optical testing of multi-electrode electrostatic membrane mirror[J]. Journal of Applied Optics, 2011, 32(2): 282-286.
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多电极静电拉伸薄膜反射镜的光学检测

  • 1.

    中国科学院长春光学精密机械与物理研究所,吉林 长春 130033;

  • 2.

    中国科学院研究生院,北京 100039

详细信息
    通讯作者:

    钟兴（1982-），男，四川自贡人，副研究员，主要从事光学设计与检测方面的研究工作。

  • 中图分类号: TN206; O484.4

Optical testing of multi-electrode electrostatic membrane mirror

  • 1.

    Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China;

  • 2.

    Graduate School of CAS,Beijing 100039,China

摘要

    摘要
  • 摘要: 利用研制的300 mm口径多电极薄膜反射镜原理样机，开展了光学检测实验工作。利用高斯光学原理对薄膜反射镜的基本光学参数进行了检测，获得了随电压变化的薄膜反射镜曲率半径和最大变形值曲线，趋势与理论计算结果一致。对薄膜反射镜的面形特性和面形检测方法进行了分析，采用激光干涉仪测试了无电压时中心区域的平面面形，RMS值为1.03 (=632.8nm)。为检验薄膜反射镜的曲面面形，搭建了Hartmann光栏法测试光路并结合Zernike多项式拟合处理方法，对使用非均布电压优化前后的曲面的低频面形进行了测试，面形误差RMS值从24.1m减小为14.7m，证明相对于单电极方案，多电极非均压对静电拉伸薄膜反射镜的面形有明显的优化作用。本文使用的检测方法和结论可为相关领域的研究提供参考。
    Abstract: A membrane mirror prototype of 300 mm diameter was developed and optically tested. Basic optical parameters of membrane mirror were tested by Gaussian optics. The results show that relations between basic parameters of membrane mirror and the applied voltages are consistent with shaping theory. The surface shape characteristics and optical testing methods of membrane mirror are discussed. Laser interferometer was used to test the plat surface when voltages were zero, and the RMS (root mean square) value of surface error was 1.03 (=632.8 nm). Hartmann testing was used to test membrane mirror surface with radius, and the result shows that RMS value of surface error changes from 24.1 m to 14.7 m when different multielectrode voltages are used for optimization. This validates that multiple electrodes with different voltages optimize the surface accuracy of membrane mirror.
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    • 参考文献(1)
  • ［1］STAHL H P. Development of lightweight mirrors technology for the next generation space telescope［J］. SPIE, 2001, 4451: 1-4.
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  • 刊出日期:  2011-03-14

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