相位激光测距与外差干涉相结合的绝对距离测量研究

周小珊; 李岩

相位激光测距与外差干涉相结合的绝对距离测量研究

周小珊^,,
李岩

清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室,北京100084

详细信息

通讯作者:
周小珊(1985-)，女，湖北武汉人，硕士研究生，主要从事激光精密测量方面的研究工作。

中图分类号: TN249;TH744.3
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出版历程
- 刊出日期: 2010-11-30

Absolute distance measurement by combining phase distance meter and heterodyne interferometer

ZHOU Xiao-shan^,,
LI Yan

State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China

摘要

摘要: 为了克服一般绝对距离测量方法量程和精度不能同时满足的问题，提出一种相位激光测距与外差干涉相结合的绝对距离测量方案。该方案使用相位激光测距技术进行粗测，双纵模He-Ne激光器外差干涉测长技术进行精测，保证两者结合的单值性。建立测量系统，对方案的可行性进行了实验验证，并对影响系统稳定性的因素进行了分析。与双频激光干涉仪的比对结果表明：测量标准差优于1mm，可以满足一些大尺寸的测量精度要求。
- 绝对距离测量 /
- 相位激光测距 /
- 外差干涉测量 /
- 双纵模He-Ne激光器
Abstract: To overcome the shortcomings of limited range and low precision in conventional absolute distance measurement, a new method is introduced by combining phase distance meter and heterodyne interferometer using He-Ne laser in dual longitudinal modes. The phase distance meter is used for coarse measurement and the heterodyne interferometer using He-Ne laser in dual longitudinal modes is used for accurate measurement. The result depends on the reliable combination of the two methods. A measurement system was built to verify the feasibility of this method and the sources of measurement error were analyzed. The comparison experiment was made against dual-frequency laser interferometer. The result shows that the system achieves the expected accuracy and its standard deviation is better than 1mm, which meets the large-scale measurement requirement.
- absolute distance measurement /
- phase distance meter /
- heterodyne interferometer /
- He-Ne laser with dual longitudinal modes

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参考文献(1)

［1］尤政,任伟明,梁晋文.无导轨绝对距离测量技术的研究［J］.应用激光,1994,14(5):218-220.
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［3］LI Tian-chu, MAY R G. An optical scanning fiber dual-interferometer system for measuring small distance［J］. Acta Metrologica Sinica,1998,19(1):207-212.
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文章访问数: 4451
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相位激光测距与外差干涉相结合的绝对距离测量研究

通讯作者:
周小珊(1985-)，女，湖北武汉人，硕士研究生，主要从事激光精密测量方面的研究工作。

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Absolute distance measurement by combining phase distance meter and heterodyne interferometer

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相位激光测距与外差干涉相结合的绝对距离测量研究

通讯作者: 周小珊(1985-)，女，湖北武汉人，硕士研究生，主要从事激光精密测量方面的研究工作。

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出版历程

Absolute distance measurement by combining phase distance meter and heterodyne interferometer

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出版历程

目录

相关数据库

广告合作

友情链接

帮助中心

通讯作者:
周小珊(1985-)，女，湖北武汉人，硕士研究生，主要从事激光精密测量方面的研究工作。