干涉图的预处理技术研究

葛锦蔓; 苏俊宏

干涉图的预处理技术研究

西安工业大学光电工程学院,陕西西安710032

详细信息

作者简介:
葛锦蔓(1984-)，女，河南焦作人，硕士研究生，主要从事光电检测及仪器方面的研究.

中图分类号: O636.1；TN911.73
计量
- 文章访问数: 4455
- HTML全文浏览量: 103
- PDF下载量: 1167
出版历程
- 刊出日期: 2009-11-14

Investigation of interferogram pre-processing

School of Optoelectronic Engineering,Xi’an Technological University ,Xi’an 710032,China

摘要

摘要: 提出了一种干涉图预处理的新方法。该方法利用数学形态学的方法对干涉图进行有效区域的边缘提取，利用二维快速傅里叶变换迭代法对干涉图进行区域延拓，并采用非加权离散余弦变换最小二乘算法对干涉图进行波面统一，最终恢复出被测物体的表面面形，为后续结果分析奠定了基础。对一个实际SiO2薄膜样片进行了干涉图的预处理。结果表明，通过该算法得到的干涉图预处理结果，与Zygo干涉仪的分析测试结果基本一致。
- 干涉图处理 /
- 数学形态学 /
- 二维傅里叶变换 /
- 最小二乘法
Abstract: The modern interferometry measurment features high precision and non-contact, which makes it widely used. As an essential part of the measruement, apre-processing of interferogram was proposed, and it included edge identification based on mathematical morphology, regional extension based on 2D fast fourier transformation (FFT), as well as unwrapped and wrapped phase based on non-weighted least square method for discrete cosine transform (DCT). At last, surface distribution was obtained. The image aquisition of the SiO2 film and the preprocessing of interferogram was performed.The result indicates that it is consistent with the result measured by Zygo interferometer.
- interference image processing /
- mathematical morphology /
- 2-D FFT /
- least square method

HTML全文

参考文献(1)

［1］殷纯永.现代干涉测量技术［M］.天津:天津大学出版社,1997.
YIN Chun-yong. Modern interferogrometric meas-uring technique［M］. Tianjin:Tianjin University Press, 1997.(in Chinese)
［2］CHENG CHIH HSU,JU YI LEE,DER CHIN SU. Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry［J］.Thin Solid Films, 2005,491:91-95.［3］HLUBINA P, CIPRIAN D, LUNACEK J, et al. Thickness of SiO2 thin film on silicon wafer measured by dispersive white-light spectral interferometry［J］. Appl. Phys. B,2006,84:511-516.
［4］CHENG CHIH HSU,JU YI LEE,DER CHIN SU. Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry［J］.Thin Solid Films, 2005,491:91-95.
［5］李婷.基于数学形态学和形态小波的边缘检测算法研究［D］.石家庄：河北师范大学,2007.
LI Ting. The study of the edge detection based on mathematical morphology and morphological wavelets［D］.Shijiazhuang: Hebei Normal University, 2007.(in Chinese)
［6］苏俊宏.干涉图空域延拓技术研究［J］.红外与激光工程,2003,34(4):397-400.
SU Jun-hong. Interferogram region spreading technology in spatial domain［J］. Infrared and Laser Engineering,2003,34(4):397-400.(in Chinese with an English abstract)
［7］JAMES J, TALAMONTI, RICHARD B, et al. Nu-merical model estimating the capabilities and limitations of the fast Fourier transform technique in absolute interferometry［J］. Applied Optics, 1996,35(13):2182-2191.
［8］朱勇建,栾竹,孙建峰,等.光学干涉图处理中基于质量权值的离散余弦变换解包裹相位［J］.光学学报,2007,27(5):848-852.
ZHU Yong-jian, LUAN Zhu, SUN Jian-feng,et al. Quality weight based discrete cosine transform phase unwrappingalgorithm in optical interferogram processing ［J］.Acta Optica Sinica, 2007,27(5):848-852. (in Chinese with an English abstract)
［9］慧梅,王东生,李庆祥,等.基于离散泊松方程解得相位展开方法［J］.光学学报,2003,23(10):1245-1249.
HUI Mei, WANG Dong-sheng, LI Qing-xiang,et al. Phase unwrapping method based on the solution of discrete poisson equation［J］. Acta Optica Sinica, 2003, 23(10):1245-1249.(in Chinese with an English abstract)

施引文献

资源附件(0)

计量

文章访问数: 4455
HTML全文浏览量: 103
PDF下载量: 1167
被引次数: 0

干涉图的预处理技术研究

作者简介:
葛锦蔓(1984-)，女，河南焦作人，硕士研究生，主要从事光电检测及仪器方面的研究.

计量

Investigation of interferogram pre-processing

计量

目录

相关数据库

广告合作

友情链接

帮助中心

干涉图的预处理技术研究

作者简介: 葛锦蔓(1984-)，女，河南焦作人，硕士研究生，主要从事光电检测及仪器方面的研究.

计量

出版历程

Investigation of interferogram pre-processing

计量

出版历程

目录

相关数据库

广告合作

友情链接

帮助中心

作者简介:
葛锦蔓(1984-)，女，河南焦作人，硕士研究生，主要从事光电检测及仪器方面的研究.