Computer-aided alignment method of coaxialthree-mirror-anastigmat system
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摘要: 给出计算机辅助装调中失调量与像差关系的数学模型，利用Zemax对折轴三反射光学系统进行失调仿真，得到失调数据，再对数据进行分析和处理，求得次镜和三镜的灵敏度矩阵，还对各种初级像差与各装调参量之间的对应关系及该系统的失调特性进行讨论。根据以上分析结果，最终确定了共轴三反射光学系统的装调方案。为了验证方案的可行性,在Zemax中对共轴三反射光学系统人为地加入不同的失调量后,按照确定的装调方案，利用建立的计算机辅助装调数学模型计算出失调量的大小和方向,再根据计算结果对共轴三反射光学系统进行调整,仿真结果和实际装调结果都证明该方案是可行的。Abstract: The mathematic model of the relationship between the misalignment and aberration in the process of computer -aided alignment is presented. The misalignment state of three-mirror-anastigmat system was simulated with Zemax, and the alignment data was obtained. The corresponding relationship between the misalignment error and elementary aberration is analyzed, and the misalignment characteristic of three-mirror-anastigmat system is summarized. The alignment scheme is determined by the above analysis. In order to verify the alignment scheme, the three-mirroranastigmat system was aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible and guidable to the alignment of three-mirror-anastigmat systems.
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