Design of Fabry-Perot etalon with transmission linear to incident angle
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摘要: 为了由非机械扫描式F-P标准具的透过率得到来袭激光的入射角，设计了一种透过率随入射角近似线性变化的F-P标准具。把薄膜光学原理应用于F-P标准具的设计之中，考虑了斜入射条件下，特别是大入射角下，增透膜和干涉腔反射层特性参数变化对其透过率的影响，针对1.06m激光，经过仿真设计，确定了F-P标准具主要参数。反射板选用K9玻璃，反射层采用单层ZnS膜时，腔长(4755)nm，膜厚(655)nm，膜层垂直反射率20.7%～24.0%，对应标准具的透过率与入射角之间线性关系为T=-52.23+87.92，透过率非线性误差5%；采用Ag膜时，腔长(46010)nm，膜厚(3.800.15)nm，膜层垂直反射率22.4%～24.8%，T=-52.28+82.05，透过率非线性误差4%。但具体的实现形式和制作工艺有待进一步研究。Abstract: In order to get laser incident angle from transmission of non-mechanical scanning Fabry-Perot etalon, a new Fabry-Perot etalon is designed, whose transmission is nearly linear to incident angle. The principle of thin film optics was applied, and the influence of the parameter change of antireflection coating and reflective film on transmission was investigated for oblique incident beam, especially for high incident angle. Main parameters of Fabry-Perot etalon were selected by simulating 1.06m laser wavelength. K9 glass was selected as reflection plate material. When reflection film is ZnS, its cavitylength is (4755)nm, film thickness is (655)nm and vertical reflectance ratio is 20.7%～24.0%, approximate linear relation is T=-52.23+87.92, nonlinear error is 5%. When reflection film is Ag, its cavity-length is (46010)nm, film thickness is (3.800.15)nm and vertical reflectance ratio is 22.4%～24.8%, approximate linear relation is T=-52.28+82.05, nonlinear error is 4%. Further study will be conducted for the implementation and fabrication process of this technology.
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Keywords:
- Fabry-Perot etalon /
- transmission /
- linear variation /
- incident angle
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