Abstract: In order to get laser incident angle from transmission of non-mechanical scanning Fabry-Perot etalon, a new Fabry-Perot etalon is designed, whose transmission is nearly linear to incident angle. The principle of thin film optics was applied, and the influence of the parameter change of antireflection coating and reflective film on transmission was investigated for oblique incident beam, especially for high incident angle. Main parameters of Fabry-Perot etalon were selected by simulating 1.06m laser wavelength. K9 glass was selected as reflection plate material. When reflection film is ZnS, its cavitylength is (4755)nm, film thickness is (655)nm and vertical reflectance ratio is 20.7%～24.0%, approximate linear relation is T=-52.23+87.92, nonlinear error is 5%. When reflection film is Ag, its cavity-length is (46010)nm, film thickness is (3.800.15)nm and vertical reflectance ratio is 22.4%～24.8%, approximate linear relation is T=-52.28+82.05, nonlinear error is 4%. Further study will be conducted for the implementation and fabrication process of this technology.