子孔径拼接技术应用的研究

Application of sub-aperture stitching technique

  • 摘要: 大口径光学元件的检测开拓了子孔径拼接应用的新领域。采用小口径干涉仪对大口径被测元件不同区域进行波前检测,然后恢复计算出被测波前。使用光学设计软件ZEMAX对子孔径检测拼接技术进行了模拟,模拟结果表明:波前检测相对误差小于4.3λ‰,实现了对大口径光学元件面形的高精度检测,避免了相同口径检测干涉仪的使用,降低了检测成本及难度。

     

    Abstract: The test and measurement of large-aperture optical elements can be made by sub-aperture stitching. The wavefront testing for each area of a largeaperture element under test was performed with a small aperture interferometer, and the wavefront of the large-aperture optical element was calculated according to the sub-aperture stitching results. It is more convenient for large-aperture optical elements to be tested with a small aperture interferometer by sub-aperture stitching method. The simulation of the sub-aperture stitching technology was carried out by the optical design software ZEMAX. The simulated result shows that the relative error of the wavefront testing is less than 4.3λ‰. The high-precision testing for the surface profile of a large-aperture optical element was realized with a small aperture interferometer.

     

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