Abstract: We get nanometer-sized InSb particle films deposited on the SiO2 subs trate by using vacuum evaporation. The atomic force microscopy was applied to the morphology survey of the film surfaces. The results show that the films are composite of nano-particles of InSb.With the analysis of the scanning images of these samples, the result of the experiment proves that different sizes of InSb particles can be formed by changing the plating time.