基于TFCALC软件的薄膜偏光分束镜的设计
The Design of Thin-Film Polarizing Beamsplitter Based on TFCALC Software
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摘要: 根据Macnielle薄膜偏光分束镜的设计原理,利用膜系设计软件对偏光分束镜进行优化设计.总结了偏光镜设计时参考波长、入射角以及膜层数随波长的变化规律,给出了LaK2基底,ZrO2和SiO2为高低膜料的薄膜偏光分束镜优化设计方案,为薄膜偏光分束镜的设计和镀膜工艺提供了参考依据.Abstract: The splitting character that the reference wavelength, incident angle and the number of thin-films change with wavelength is analysised based on Macnielle type thin-film prism by using TFCALC software, which will contribute to the optimization and deposition technology of this kind of prism. We proposed a optimizing design of a polarizing beamsplitter whose substrate is LaK2 and the thin film material is ZrO2 and SiO2.