FDLC薄膜的化学结构对光学性能的影响

刘雄飞; 张德恒; 齐海兵

FDLC薄膜的化学结构对光学性能的影响

中南大学物理科学与技术学院,长沙410083

详细信息

通讯作者:
张德恒

中图分类号: TN304-055
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出版历程
- 刊出日期: 2007-01-09

Influence of chemistry structure of FDLC film on optical property

School of Physics Science and Technology,Central South University,Changsha 410083,China

More Information

Corresponding author:
ZHANG De-heng

摘要

摘要: 研究氟化类金刚石（FDLC）薄膜化学结构对光学性能的影响，用等离子体增强化学气相沉积（PECVD）法在玻璃基底上沉积氟化类金刚石（FDLC）薄膜，用俄歇能谱、傅里叶红外光谱(FTIR)、紫外可见光分光光度计 (UV-VIS)对薄膜进行分析。分析结果表明：沉积薄膜是典型的类金刚石结构，薄膜中氟主要以C-F2键存在；随着沉积温度的提高，C-F2含量先增后减；随着F含量的增加，FDLC薄膜的sp3含量减少，sp2含量增加；光学带隙与sp2键含量密切相关，sp2含量越大，薄膜的光学带隙越小。
- 氟化类金刚石薄膜 /
- 等离子体增强化学气相沉积(PECVD) /
- 光学带隙 /
- 沉积温度
Abstract: In order to study the influence of chemistry structure of FDLC film on optical property, the fluorinated diamond-like carbon(FDLC) films were deposited on the glass substrate with the method of PECVD, and analyzed by AES, FTIR and UV-VIS. The result shows that the deposited films are typical diamond-like structure and the fluorine in the films exists in the form of C-F2 key; the content of C-F2, increases in the first period and then reduces as the temperature continuously rises in the deposition process; the sp3 content of FDLC films decreases and the sp2 content increases when the fluorine content increases; the optical band gap has a close relationship with the content of sp2 key, and the more the sp2 content is, the smaller the optical band gap will be.
- FDLC film /
- PECVD /
- optical band gap /
- deposition temperature