Abstract: Transparent conductive thin films are widely used as semi-conductor optoelectronic materials. Indium tin oxide (ITO) transparent conductive thin films have some characteristics, for instance, rare reserve, high preparation cost, inherent low stability, toxicity, and complex preparation techniques. Compared with the ITO films, the aluminum-doped zinc (ZAO) films have many advantages such as lower manufacturing cost, simple preparation techniques, non-toxicity and higher stability. The ITO films will be replaced by the ZAO films. The ZAO films have a brilliant prospect of development and application. The recent progress in research on ZAO films is reviewed.