基于自准直原理的紧凑型激光位移传感器光学系统设计

张欣婷; 吴倩倩; 亢磊

doi:10.5768/JAO202344.0401003

基于自准直原理的紧凑型激光位移传感器光学系统设计

doi: 10.5768/JAO202344.0401003

1.
长春电子科技学院，吉林长春 130012
2.
中国中车长春轨道客车股份有限公司，吉林长春 130062

基金项目: 吉林省科技厅重点科技攻关项目（20150204044G X）

详细信息

作者简介:
张欣婷（1984—），女，博士，教授，硕士生导师。主要从事光学设计、光学检测和光电仪器等研究。E-mail：luoyiwuhens@163.com

中图分类号: TN202；O439
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- 被引次数: 0
出版历程
- 收稿日期: 2022-12-06
- 修回日期: 2022-12-26
- 网络出版日期: 2023-05-04
- 刊出日期: 2023-07-15

Optical system design of compact laser displacement sensor based on auto-collimation principle

1.
Changchun Institute of Electronic Science and Technology, Changchun 130012, China
2.
CRRC Changchun Railway Vehicles Co.,Ltd., Changchun 130062, China

摘要

摘要: 分析传统直射式和斜射式激光位移传感器的特性，结合两者的优势，设计了一种基于自准直原理的紧凑型激光位移传感器。在结构上，利用直线结构取代了大三角的光路布局，形成自准直式光路结构。引入分光比50%的分束镜，与光轴成45°角放置，将会聚透镜和成像透镜合为一枚，并使聚光镜、分束镜和光电探测器共轴，简化了系统结构，减小了仪器体积，同时，推导了符合自准直原理的Scheimpflug条件。利用光学设计软件Zemax对光学系统进行仿真，系统采用单透镜的结构形式，前表面为Forbes非球面，入瞳直径$ D=4\;\text{mm} $，视场角$ \text{2}\omega =4^{\circ}$，总长$L = 20\;{\text{mm}}$，成像质量和系统尺寸均达到最佳。该系统具有测量范围大、分辨力高、结构尺寸小、光能损失小等特点，通过实验与Keyence激光位移传感器比较，该系统能够保证测头分辨力$1\;{\text{μm}}$、综合检测精度$ \pm {\text{2}}\;{\text{μm}}$的技术指标。
- 光学设计 /
- 激光位移传感器 /
- 自准直 /
- Scheimpflug条件 /
- 紧凑型
Abstract: The characteristics of traditional direct and oblique laser displacement sensor were analyzed. Combined with their advantages, a compact laser displacement sensor based on auto-collimation principle was designed. In the structure, the linear structure was used to replace the optical path layout of the large triangle, and the auto-collimation optical path structure was formed. A beam splitter with a splitting ratio of 50% was introduced and placed at an angle of 45° with the optical axis to combine the focusing lens and imaging lens into one, and made the condenser, beam splitter and photo-detector coaxial, which simplified the system structure and reduced the volume of the instrument. At the same time, the Scheimpflug condition conforming to the auto-collimation principle was derived. The optical design software Zemax was used to simulate the optical system. The system adopts the structure of single lens, the front surface is Forbes aspheric surface, the entrance pupil diameter D is 4 mm, the field angle 2 ω is 4°, the total length L is 20 mm, and the imaging quality and system size are the best. The system has the characteristics of large measurement range, high resolution, small structure size and small light energy loss. Compared with the experiments of Keyence laser displacement sensor, the system can ensure the technical indexes of probe resolution 1 μm and comprehensive detection accuracy ±2 μm.
- optical design /
- laser displacement sensor /
- auto-collimation /
- Scheimpflug condition /
- compact type

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图 1 直射式激光三角法

Fig. 1 Direct laser triangulation

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图 2 斜射式激光三角法

Fig. 2 Oblique laser triangulation

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图 3 自准直激光三角测头原理

Fig. 3 Schematic diagram of auto-collimation laser triangular probe

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图 4 光学系统结构图

Fig. 4 Structure diagram of optical system

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图 5 MTF曲线

Fig. 5 Modulation transfer function curves

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图 6 点列图

Fig. 6 Spot diagram

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图 7 球差曲线

Fig. 7 Spherical aberration curve

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图 8 实验装置图

Fig. 8 Physical drawing of test device

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表 1 直射式和斜射式激光三角测头对比

Table 1 Comparison of direct and oblique laser triangular probe

	直射式	斜射式
测量范围	大	小
分辨力	低	高
结构尺寸	小	大
光能损失	大	小
被测对象	表面较粗糙、散射性好	表面高反射率

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表 2 主要技术指标

Table 2 Main technical indicators

主要技术参数	指标
成像波段/nm	650
入瞳直径/mm	4
视场角/（˚）	40
系统总长/mm	20
分辨力/μm	1
综合检测精度/μm	±2

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表 3 非球面系数

Table 3 Aspheric coefficients

级数	非球面系数${a_m}$/mm
0	$2.370 \times {10^{ - 3}}$
1	$1.985 \times {10^{ - 3}}$
2	$6.450 \times {10^{ - 3}}$
3	$3.328 \times {10^{ - 4}}$
4	$ 4.057\times {10}^{-5} $

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表 4 圆柱度误差测量结果

Table 4 Cylindricity error measurement results

序号	回转角度/（°）	轴向行程/mm	测量值/mm	真值/mm	标准差/mm
1	0	50	0.039	0.039	0.001 05
2	40	100	0.041	0.040
3	80	150	0.040	0.040
4	120	200	0.041	0.040
5	160	250	0.041	0.039
6	200	300	0.039	0.040
7	240	350	0.040	0.041
8	280	400	0.041	0.040
9	320	450	0.039	0.039
10	360	500	0.041	0.040

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表 5 Keyence和自准直激光三角测头参数比较

Table 5 Parameter comparison of Keyence and auto-collimation laser triangular probe

主要技术参数	Keyence激光三角测头	自准直激光三角测头
结构尺寸（系统总长）/mm	>40	20
测量范围（被测距离）/mm	60	<40	>40
分辨力/μm	0.1	0.1	1
综合检测精度/μm	1	1	2

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