Error analysis of precision scanning system for measuring reflectivity of large aperture optical elements
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摘要: 为测量高能激光传输系统中大口径高反射率光学元件的反射率，设计了一种大口径光学元件二维扫描的精密测量系统。介绍了该系统的结构及其工作原理，分析了影响系统测量精度的因素，从理论上分析了扫描系统的系统误差对测量精度的影响，结果表明在垂直于光束传播方向上，水平偏差在0.29 mm时，测量误差在10−6量级；腔长的变化量是较小时，可通过对衰荡腔腔镜的调节,实现对旋转轴偏差的补偿及对系统的精细调节。通过拟合处理光强与时间的数据得到对应的一次指数函数拟合曲线，并通过计算得到衰荡时间和反射率，经过对比分析可知，该误差分析方法能比较有效地测量腔镜的反射率并能减小实验数据本身带来的误差。Abstract: In order to measure the reflectance of large aperture and high reflectance optical elements in high energy laser transmission system, a precision measurement system for two-dimensional scanning of large aperture optical elements was designed. The structure and working principle of the system are introduced, and the factors affecting the measurement accuracy of the system are analyzed. The influence of the systematic error of the scanning system on the measurement accuracy is theoretically analyzed. The results show that the measurement error is 10-6 magnitude when the horizontal deviation is 0.29mm perpendicular to the beam propagation direction. When the variation of cavity length is small, the rotation axis deviation can be compensated by adjusting the cavity mirror of ring-down cavity, and the system can be fine adjusted. By fitting processing of measured light intensity and time data to get the corresponding a exponential function fitting curve, and ring-down time is obtained by calculation and reflectivity, ring-down time and reflectivity is obtained by calculation, through contrast analysis shows that this kind of error analysis method can more effectively measured reflectivity of cavity mirrors and can reduce the error brought by the experimental data itself.
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Key words:
- optical measurement /
- Ultra-high reflectivity /
- Cavity ring-down /
- Measurement accuracy /
- Large diameter
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图 1 脉冲光腔衰荡法测量原理图
Fig. 1 Working principle of the pyroelectric laser energy meter detector
图 4 大口径光学元件精密扫描系统结构图
Fig. 4 Structure diagram of large aperture optical element precision scanning system
表 1 光腔衰荡时间和对应的反射率
Table 1 Cavity ring-down time and corresponding reflectivity
实验次数 1 2 3 4 5 6 τ 18.018 18.012 18.083 17.992 18.126 18.051 R 0.999 815 0.999 814 0.999 815 0.999 817 0.999 816 0.999 815 
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