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测量大口径光学元件反射率用精密扫描系统误差分析

张彪 张金玉 吉晓 段园园 吴磊 黎高平 于东钰 阴万宏

张彪, 张金玉, 吉晓, 段园园, 吴磊, 黎高平, 于东钰, 阴万宏. 测量大口径光学元件反射率用精密扫描系统误差分析[J]. 应用光学.
引用本文: 张彪, 张金玉, 吉晓, 段园园, 吴磊, 黎高平, 于东钰, 阴万宏. 测量大口径光学元件反射率用精密扫描系统误差分析[J]. 应用光学.
ZHANG Biao, ZHANG Jinyu, JI Xiao, DUAN Yuanyuan, WU Lei, LI Gaoping, YU Dongyu, YIN Wanhong. Error analysis of precision scanning system for measuring reflectivity of large aperture optical elements[J]. Journal of Applied Optics.
Citation: ZHANG Biao, ZHANG Jinyu, JI Xiao, DUAN Yuanyuan, WU Lei, LI Gaoping, YU Dongyu, YIN Wanhong. Error analysis of precision scanning system for measuring reflectivity of large aperture optical elements[J]. Journal of Applied Optics.

测量大口径光学元件反射率用精密扫描系统误差分析

基金项目: 技术基础科研项目(JSJL2020208A003);测试仪器项目(2006ZCGG0103-2)
详细信息
    作者简介:

    张彪(1979—),男,博士,高级工程师,主要从事激光参数计量技术研究。E-mail:80811543@qq.com

Error analysis of precision scanning system for measuring reflectivity of large aperture optical elements

  • 摘要: 为测量高能激光传输系统中大口径高反射率光学元件的反射率,设计了一种大口径光学元件二维扫描的精密测量系统。介绍了该系统的结构及其工作原理,分析了影响系统测量精度的因素,从理论上分析了扫描系统的系统误差对测量精度的影响,结果表明在垂直于光束传播方向上,水平偏差在0.29 mm时,测量误差在10−6量级;腔长的变化量是较小时,可通过对衰荡腔腔镜的调节,实现对旋转轴偏差的补偿及对系统的精细调节。通过拟合处理光强与时间的数据得到对应的一次指数函数拟合曲线,并通过计算得到衰荡时间和反射率,经过对比分析可知,该误差分析方法能比较有效地测量腔镜的反射率并能减小实验数据本身带来的误差。
  • 图  1  脉冲光腔衰荡法测量原理图

    Fig.  1  Working principle of the pyroelectric laser energy meter detector

    图  2  折叠衰荡腔示意图

    Fig.  2  Working principle of the pyroelectric laser energy meter detector

    图  3  光腔衰荡法测试系统

    Fig.  3  Optical cavity ring-down test system

    图  4  大口径光学元件精密扫描系统结构图

    Fig.  4  Structure diagram of large aperture optical element precision scanning system

    图  5  光学偏差示意图

    Fig.  5  Schematic diagram of optical deviation

    图  6  一次指数函数拟合曲线图

    Fig.  6  Fitting curve of first order exponential function

    表  1  光腔衰荡时间和对应的反射率

    Table  1  Cavity ring-down time and corresponding reflectivity

    实验次数123456
    τ18.01818.01218.08317.99218.12618.051
    R0.999 8150.999 8140.999 8150.999 8170.999 8160.999 815
    下载: 导出CSV
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  • 网络出版日期:  2022-09-17

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