超高<i>Q</i>值mm级晶体回音壁微腔加工

刘军汉; 曲天良; 张铉; 刘彦清; 熊长新

doi:10.5768/JAO202344.0401006

超高Q值mm级晶体回音壁微腔加工

doi: 10.5768/JAO202344.0401006

华中光电技术研究所武汉光电国家研究中心，湖北武汉 430223

基金项目: 国家自然科学基金（62073055）；华中光电技术研究所资金项目（ZY577）

详细信息

作者简介:
刘军汉（1981—），男，高级工程师，主要从事超精密光学加工与检测技术研究。E-mail：j.h.liu@163.com

中图分类号: TN206；TG580.6
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出版历程
- 收稿日期: 2022-08-01
- 修回日期: 2022-10-08
- 网络出版日期: 2023-05-30
- 刊出日期: 2023-07-15

Fabrication of ultra-high Q factor and millimeter-scale crystal echo wall microcavity

Wuhan National Laboratory for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430223, China

摘要

摘要: 回音壁微腔具有超高Q值和极小的模式体积，在微波光子系统、非线性光学和量子光学等领域中具有广阔的应用前景。通过分析mm级氟化镁（MgF₂）晶体回音壁微腔的损耗因素，确认了影响回音壁微腔品质因数的主要指标为材料等级和表面粗糙度。设计了mm 级MgF₂晶体回音壁微腔的结构形式，使用DUV级MgF₂晶体，如果回音壁微腔表面粗糙度小于0.7 nm，则MgF₂晶体回音壁微腔的极限损耗理论计算值为4.781×10⁻¹¹，对应的极限Q值为2.09×10¹⁰。通过对MgF₂晶体回音壁微腔进行粗成型、精密车削、精密抛光，实现了高品质因数的微腔制造。测试结果表明，回音壁微腔的表面粗糙度Ra值为0.669 nm、微观形貌PV值为6.767 nm、品质因数为2.054×10⁹@1 550 nm。
- 晶体 /
- 回音壁微腔 /
- 表面粗糙度 /
- 品质因数 /
- 损耗
Abstract: The whispering gallery mode (WGM) microcavity has ultra-high Q factor and an extremely small pattern volume, and has a broad application prospect in the fields of microwave photonic systems, nonlinear optics and quantum optics. By analyzing the loss factors of millimeter-scale magnesium fluoride (MgF₂) crystal WGM microcavity, it was confirmed that the main indexes affecting the quality factor of WGM microcavity were material grade and surface roughness. The structure of WGM microcavity was designed with millimeter-scale MgF₂ crystal, and the DUV-level MgF₂ crystal was used. Assuming the surface roughness of WGM microcavity was less than 0.7 nm, the theoretical calculation value of limit loss was 4.781×10⁻¹¹ and the corresponding limit Q value was 2.09×10¹⁰. Through rough machining, precision turning and precision polishing of WGM microcavity of MgF₂ crystal, the microcavity manufacturing with high quality factor was realized. The test results show that the surface roughness of WGM microcavity is 0.669 nm (Ra value), the shape error is 6.767 nm (PV value), and the quality factor is 2.054×10⁹@1 550 nm.
- crystal /
- echo wall microcavity /
- surface roughness /
- quality factor /
- loss

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图 1 回音壁微腔3D模拟图

Fig. 1 3D simulation diagram of WGM microcavity

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图 2 回音壁微腔精密车削

Fig. 2 Precision turning of WGM microcavity

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图 3 回音壁微腔精密抛光

Fig. 3 Precision polishing of WGM microcavity

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图 4 加工后的回音壁微腔

Fig. 4 Fabricated WGM microcavity

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图 5 微腔侧壁形貌检测结果

Fig. 5 Test results of microcavity sidewall morphology

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图 6 微腔表面显微镜照片（200^×）

Fig. 6 Photomicrographs （200^×） of microcavity surface

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图 7 微腔品质因数测量原理图

Fig. 7 Schematic diagram of microcavity Q factor measurement

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图 8 回音壁微腔品质因数检测结果

Fig. 8 Test results of quality factor of WGM microcavity

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