Surface characteristics study of laser-induced thin film damagebased on similarity measure algorithm
-
摘要: 鉴于薄膜激光损伤性能评价是增强抗激光红外观察窗口性能的重要保证，给出薄膜在脉冲激光诱导作用下的损伤表面特性及其机理。实验采用YAG脉冲激光器对TiO2薄膜样片进行1-on-1方式的激光诱导。通过CCD采集TiO2薄膜激光辐照前后2幅图像，将这2幅图像进行匹配，建立差异图像测度算法；实验得出TiO2薄膜样片的差异能量测度可判别出损伤情况，即测度值M＜0.1为未发生损伤，0.1＜M＜0.2为轻度损伤，0.2＜M＜0.5为中度损伤，M＞0.5为严重损伤。薄膜样片经过能量密度为0.5 J/cm2的激光辐照后粗糙度明显增大。研究结果表明，采用激光辐照前后图像匹配的测试方法可实现薄膜激光损伤与否的判别。Abstract: The determination method of laser damage of thin film and the evaluation method of damage threshold are indispensable for enhancing anti-laser ability of infrared system observation window and its operating performance. The damage characteristics and mechanism of film by pulse laser induced damage were researched. The experiments used by YAG pulsed laser for TiO2 thin film were offered for 1-on-1 way of laser induced. By using the two images taken from charge coupled device (CCD) before and after laser illumination, the matching of the damaged image and the undamaged image was realized, and the difference image measure algorithm was established. The experiments conclude that the different energy measures of TiO2 thin film samples can identify the damage situation:the measure value M0.1, no damage; 0.1M 0.2, mild injuries;0.2M0.5, moderate damage; M0.5, serious injuries. The roughness of thin film samples irradiated by the laser with the energy density of 0.5 J/cm2 increases obviously. The results show that the method of image matching test before and after laser irradiation can realize discrimination of laser-induced film damage.
-
-
[1]Shang Xuchuan, Zhang Rongzhu.Analysis of avalanche mechanisms in laser-induced damage[J].Optics & Laser Technology, 2010,(42): 243-246.
[2]Detlev R,Marco J, Kai S. Laser damage thresholds of optical coatings[J].Thin Solid Films,2009,518:1607-1613.
[3]Min O Y,Hyuk L S.A numerical study on ultra-short pulse laser-induced damage on dielectrics using the Fokker-Planck equation[J].International Journal of Heat and Mass Transfer,2006(49) :1493-1500.
[4]Han Wenqin,Guo Xiqing,Xie Guanbao, et al.Pulse laser damage characteristic measurement of VO2 optical thin film[J].Journal of Applied Optics,2013,34(4):690-694
韩文钦,郭喜庆,解官宝，等. VO2光学薄膜的脉冲激光损伤特性测试[J]. 应用光学，2013,34(4):690-694.
[5]Anon. EN ISO 11254-2-2001 lasers and laser related equipment determination of laser induced damage threshold of optical surfaces part2:S-on-1 test[S].UK: The Europe Standards Institute,2001.
[6]He Hongbo,Hu Haiyang,Tang Zhiping.Laser-induced damage morphology of high-optical coatings[J].Applied Surface Science,2005,241:442-448.
[7]Gong Hui,Li Chengfu,Wang Mingli.Thermal shock effect on optical films damage induced by high power laser[J]. Chinese Journal of Laser,1996,23(3): 245-248.
龚辉,李成富，王明利.激光对光学薄膜损伤的热冲击效应[J].中国激光,1996,23(3): 245-248.
[8]Xie Songlin,Su Junhong,Xu Junqi. Laser damage characteristics of diamond-like carbon film[J]. Chinese Journal of Vacuum Science and Technology, 2006,26(6):533-536.
谢松林,苏俊宏,徐均琪.类金刚石薄膜的激光损伤特性测试与分析[J].真空科学与技术学报, 2006,26(6):533-536.
[9]Karner C, Mandel A.Pulsed laser photothermal displacement spectroscopy for surface studies[J]. Appl. Phys. A,1985,(38):19-21.
计量
- 文章访问数: 1227
- HTML全文浏览量: 91
- PDF下载量: 187
下载:
陕公网安备 61011302001501号 