表面粗糙度数字全息检测

陈刚; 周文静; 胡祯; 周清; 彭克琴; 张伟

表面粗糙度数字全息检测

陈刚^1, ,,
周文静²,
胡祯¹,
周清¹,
彭克琴²,
张伟²

1.
上海市质量监督检验技术研究院,上海 200072;
2.
上海大学精密机械工程系,上海 200072

基金项目:

国家自然科学基金资助项目（61107004）;国家质检总局科技计划项目（2013Qk143）

详细信息

通讯作者:
陈刚（1983-），男，江苏靖安人，硕士，主要从事长度测量技术研究工作。 Email:chengangzc@163.com

中图分类号: TN206；TB133
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出版历程
- 刊出日期: 2014-11-15

Surface roughness measurement based on digital holography

1.
Shanghai Institute of Quality Inspection and Technical Research,Shanghai 200072,China;
2.
Department of Precision Mechanical Engineering,Shanghai University,Shanghai 200072,China

摘要

摘要: 鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值，将其映射为表面轮廓值后来计算表面粗糙度参数的，分别以标准分辨率板和高度标定板为检测样本，对构建的数字全息测量系统进行了重建误差及重复性测试，包括横向尺寸误差及高度误差，横向尺寸重建误差及重复误差分别为1.11%和0.61%，高度重建误差及重复误差分别为11%和1.8%。以宽带介质膜平面反射镜为样本，测得其3段评定长度（包含15个取样长度）的表面粗糙度平均值分别为0.010 37 m、0.010 33 m和0.009 67 m。
- 无损检测 /
- 数字全息 /
- 表面粗糙度
Abstract: Surface roughness measurement based on digital holography was carried out. The tested surface roughness parameters were calculated from the surface profile which was mapped from the reconstructed phase distribution of digital hologram. Firstly, the standard calibration plate and high-resolution panel were taken as the tested samples to reconstruct errors and test the repeatability of the digital holography measurement system,involving the lateral size error and the height error. The reconstruction error and repeatability error for lateral size were 1.11%, 0.61%, respectively. And the errors for height were 11%, 1.8%, respectively. Then an ordinary coated reflector was taken as a sample, and its surface roughness values along 3 segments of evaluation length were 0.010 37 m, 0.010 33 m, and 0.009 67 m, respectively(15 sampling lengths).
- non-destructive measurement /
- digital holography /
- surface roughness

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参考文献(1)

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