光栅尺测长式激光差动共焦曲率半径测量系统

徐鹏; 赵维谦; 王方彪; 肖阳; 周桃庚

光栅尺测长式激光差动共焦曲率半径测量系统

北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室,北京 100081

基金项目:

国家自然科学资助项目（91123014;61327010）;国家重大科学仪器开发专项（2011YQ04013602）;国家高科技研究发展计划（2012AA040507）

详细信息

通讯作者:
徐鹏（1989-），男，山东日照人，硕士研究生，主要从事光学元件参数测量方面的研究。 Email：18612301869@126.com

中图分类号: TN247; TH741
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出版历程
- 刊出日期: 2014-11-14

Laser differential confocal curvature measurement system with grating length

Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology,School of Opto-electronics,Beijing Institute of Technology,Beijing 100081,China

摘要

摘要: 为了增强高精度曲率半径测量仪器的抗环境干扰能力,满足现场使用需求，研制了一套基于光栅尺测长的激光差动共焦曲率半径测量系统。该系统利用差动共焦轴向光强响应曲线的过零点对应系统物镜聚焦焦点这一特性，对被测样品的猫眼位置及共焦位置进行精确瞄准定位，并借助光栅尺测长得到透镜猫眼位置与共焦位置之间的距离，实现曲率半径的测量。实验表明，该系统相对测量精度优于510-6，满足高精度曲率半径测量的精度需求。
- 差动共焦 /
- 曲率半径测量 /
- 非接触测量 /
- 光栅尺
Abstract: In order to enhance the environmental anti-interference capability for the radius of curvature （ROC） measurement and meet the requirements of use on the production spot, a laser differential confocal curvature measurement system with grating was developed, which used the property, that the zero point of a differential confocal intensity curve corresponds to the focus of objective, to precisely identify the cat-eye and confocal positions of the tested lens, and then used the grating to measure the distance between these two positions, thereby the highprecision measurement of ROC was achieved. Experimental results show that the system has an accuracy of better than 510-6. So it can meet the demand of high-precision measurement of ROC.
- differential confocal /
- curvature radius measurement /
- non-contact measurement /
- grating

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参考文献(1)

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文章访问数: 1454
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光栅尺测长式激光差动共焦曲率半径测量系统

通讯作者: 徐鹏（1989-），男，山东日照人，硕士研究生，主要从事光学元件参数测量方面的研究。 Email：18612301869@126.com

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出版历程

Laser differential confocal curvature measurement system with grating length

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出版历程

目录

通讯作者:
徐鹏（1989-），男，山东日照人，硕士研究生，主要从事光学元件参数测量方面的研究。 Email：18612301869@126.com