Abstract:
In order to enhance the environmental anti-interference capability for the radius of curvature (ROC) measurement and meet the requirements of use on the production spot, a laser differential confocal curvature measurement system with grating was developed, which used the property, that the zero point of a differential confocal intensity curve corresponds to the focus of objective, to precisely identify the cat-eye and confocal positions of the tested lens, and then used the grating to measure the distance between these two positions, thereby the highprecision measurement of ROC was achieved. Experimental results show that the system has an accuracy of better than 510-6. So it can meet the demand of high-precision measurement of ROC.