HfO2/SiO2薄膜的激光预处理作用研究

李海波, 杜雅薇, 张清华, 卫耀伟

李海波, 杜雅薇, 张清华, 卫耀伟. HfO2/SiO2薄膜的激光预处理作用研究[J]. 应用光学, 2014, 35(5): 902-907.
引用本文: 李海波, 杜雅薇, 张清华, 卫耀伟. HfO2/SiO2薄膜的激光预处理作用研究[J]. 应用光学, 2014, 35(5): 902-907.
shu
Li Hai-bo, Du Ya-wei, Zhang Qing-hua, Wei Yao-wei. Laser conditioning effect of HfO2/SiO2 film[J]. Journal of Applied Optics, 2014, 35(5): 902-907.
Citation: Li Hai-bo, Du Ya-wei, Zhang Qing-hua, Wei Yao-wei. Laser conditioning effect of HfO2/SiO2 film[J]. Journal of Applied Optics, 2014, 35(5): 902-907.
shu

HfO2/SiO2薄膜的激光预处理作用研究

  • 成都精密光学工程研究中心,四川 成都 610041

详细信息
    通讯作者:

    李海波（1977-），女，安徽无为人，高级工程师，主要从事光学工程研究工作。 Email:hbli@163.com

  • 中图分类号: TN249

Laser conditioning effect of HfO2/SiO2 film

  • Chengdu Fine Optical Engineering Research Center, Chengdu 610041,China

摘要

    摘要
  • 摘要: 对电子束蒸发方式镀制的HfO2/SiO2反射膜采用大口径激光进行辐照，采用激光量热计测量了激光辐射前后的弱吸收值。实验发现HfO2/SiO2反射膜在分别采用1 064 nm和532 nm的激光辐照前后薄膜吸收分别从5.4%和1.7%降低到1.4和1.2%。采用聚焦离子束技术分析了激光辐照后薄膜的损伤形态并探究了损伤原因，发现：薄膜在激光辐照下存在节瘤的地方容易出现薄膜损伤，具体表现为熔融、部分喷发、完全脱落3种形态，节瘤缺陷种子来源的差异是导致其损伤机理也存在着巨大差异的主要原因。同时这些节瘤缺陷种子来源也影响着激光预处理作用效果，激光预处理技术对于祛除位于基底上种子形成的节瘤是有效的，原因是激光辐射过后该节瘤进行了预喷发而不会对后续激光产生影响；而激光预处理技术对位于膜层中间的可能是镀膜过程中材料飞溅引起的缺陷是无效的，需要通过飞秒激光手段对该类节瘤进行祛除。
    Abstract: Large aperture laser was used to irradiated the HfO2/SiO2 reflectors, which were evaporated from hafnia and silica by e-beam. Laser calorimeter was used to test the film absorption before and after laser irradiation. The results show that film absorption decreased from 5.4%, 1.7% to 1.4%, 1.2%, when the measurement wavelengths were 1 064 and 532 nm, respectively. Focused ion beam (FIB) was used to study the damage morphology after laser irradiation and to explore the cause of damage. The film where nodule existed was easily damaged, and the damage morphology mainly presented melt, partly erupted and absolutely fallen off. For the HfO2/SiO2 reflectors, laser conditioning was effective to eject the nodules on substrate. It was result from the nodule residue not to affect the subsequent laser. In addition, laser conditioning was not effective to the nodule in the film, which may be from the material spatter in coating process. In this case, other method can be used to get rid of the nodules.
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  • [1]Feit M D, Rubenchik A M, Kozlowski M R, et al. Extrapolation of damage test data to predict performance of large-area NIF optics at 355nm[J]. SPIE, 1998, 3578: 226-234.
    [2] Hue J, Génin F Y, Maricle S M, et al. Towards predicting the laser damage threshold of large-area optics[J]. SPIE, 1997, 2966: 451-462.
    [3]Combis P, Bonneau F, Daval G, et al. Laser-induced damage simulations of absorbing materials under pulsed IR irradiation[J]. SPIE, 2000, 3902: 317-323.
    [4]Zaitsu S, Motokoshi S, Jitsuno T, et al. Laser-induced damage of optical coatings grown with surface chemical reaction[J]. SPIE, 1999, 3492:204-211.
    [5]Runkel M J, Williams W H, De Yoreo J J. Predicting bulk damage in NIF triple harmonic generators[J]. SPIE, 1998, 3578:322-335.
    [6]Staggs M C, Balooch M, Kozlowski M R, et al. In-situ atomicforce microscopy of lasercondition and laser damage HfO2/SiO2 dielectric mirror coatings[J]. SPIE, 1992, 1624:375-385.
    [7]Bercegol H. What is laser conditioning? A review focused on dielectric multilayer[J]. SPIE, 1998, 3578: 421-427.
    [8]Allen S D, Porteus J O, Faith W N. Infrared laser induced desorption of H2O and hydrocarbons from optical surface[J].App.Phys.Lett., 1982, 41 (5):416-418.
    [9]Schildbach M, Chase L L, Hamza A V. Investigation of neutral atom and ion emission during laser conditioning of multilayer HfO2-SiO2 coatings[J]. SPIE, 1990, 1441:287-293.
    [10]Fornier A, Cordillot C, Ausserre D, et al. Laser conditioning of optical coatings: some issues in the characterization by atomic force microscopy[J]. SPIE, 1994, 2114:355-365.
    [11]Shan Yongguang, Liu Xiaofeng, He Hongbo, et al. Research progress of nodular defect in optical coatings[J]. High Power Laser and Particle Beams, 2011(06): 1421-1429.
    单永光，刘晓凤，贺洪波，等。光学薄膜中节瘤缺陷研究进展[J].强激光与离子束，2011(06):1421-1429.
    [12]Wei Chaoyang, He Hongbo, Shao Jianda, et al. The mechanism of defect absorption induced laser damage[J]. Acta Optica Sinica, 2008, 28(4):809-812.
    魏朝阳，贺洪波，邵建达, 等。吸收杂质热辐射诱导光学薄膜破坏的热力机制[J].光学学报, 2008, 28（4）:809-812.
    [13]Hu Haiyang. Research on optical thin film coupled with damage and laser thermal[D]. Shanghai: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, 2004
    胡海洋.光学薄膜强激光热力耦合损伤研究[D].上海：中国科学院上海光学精密机械研究所, 2004.
    [14]Wu Z L, Fan Z X, Schaer D. In-situ investigation of laser conditioning of optical coatings[J]. SPIE, 1992, 1642:362-374.
    [15]Papandrew A B, Stolz C J, Wu Z L, et al. Laser conditioning characterization and damage threshold prediction of hafnia/silica multilayer mirrors by photothermal microscopy[J].SPIE, 2001,4347:53-61.
    [16]Dijon J, Poulingue M, Hue J. Thermomechanical model of mirror laser damage at 1.06 μm: I. nodule ejection[J]. SPIE, 1999, 3578:387-397.
    [17]Taniguchi J, Lebarron N E, Howe J, et, al. Functional damage threshold of hafnia/silica coating designs for the NIF laser[J]. SPIE, 2000, 4347:4347-1-9.
    [18]Wolfe J, Qiu R, Stolz C, et al. Laser damage resistant pits in dielectric coatings created by femtosecond laser machining[J]. SPIE, 2009, 7504:750405-1-8.
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  • 刊出日期:  2014-10-14

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