基于Shark-Hartmann理论的波前探测技术研究

郭广妍, 樊仲维, 余锦, 葛文琦, 康治军, 唐熊忻, 貊泽强, 王昊成, 石朝辉

郭广妍, 樊仲维, 余锦, 葛文琦, 康治军, 唐熊忻, 貊泽强, 王昊成, 石朝辉. 基于Shark-Hartmann理论的波前探测技术研究[J]. 应用光学, 2014, 35(5): 823-829.
引用本文: 郭广妍, 樊仲维, 余锦, 葛文琦, 康治军, 唐熊忻, 貊泽强, 王昊成, 石朝辉. 基于Shark-Hartmann理论的波前探测技术研究[J]. 应用光学, 2014, 35(5): 823-829.
shu
Guo Guang-yan, Fan Zhong-wei, Yu Jin, Ge Wen-qi, Kang Zhi-jun, Tang Xiong-xin, Mo Ze-qiang, Wang Hao-cheng, Shi Zhao-hui. Wavefront detection technology based on Shark-Hartmann theory[J]. Journal of Applied Optics, 2014, 35(5): 823-829.
Citation: Guo Guang-yan, Fan Zhong-wei, Yu Jin, Ge Wen-qi, Kang Zhi-jun, Tang Xiong-xin, Mo Ze-qiang, Wang Hao-cheng, Shi Zhao-hui. Wavefront detection technology based on Shark-Hartmann theory[J]. Journal of Applied Optics, 2014, 35(5): 823-829.
shu

基于Shark-Hartmann理论的波前探测技术研究

  • 1.

    中国科学院光电研究院,北京 100094;

  • 2.

    中国科学院大学,北京 100049;

  • 3.

    中国国科世纪激光技术有限公司,北京 102211

详细信息
    通讯作者:

    郭广妍（1988-），女，河北邯郸人，硕士研究生，主要从事激光技术及自适应光学系统方面的研究。 Email：guoguangyan@aoe.ac.cn

  • 中图分类号: TN247

Wavefront detection technology based on Shark-Hartmann theory

  • 1.

    Academy of OptoElectronics,Chinese Academy of Sciences,Beijing 100094,China;

  • 2.

    University of Chinese Academy of Sciences,Beijing 100049,China;

  • 3.

    Beijing GK Laser Technology Co.,Ltd.,Beijing 102211,China

摘要

    摘要
  • 摘要: 精确的波前探测是反射镜面型检测及光束波前畸变测量的重要依据，论文根据Shark-Hartmann理论对波前探测技术进行了模拟和实验研究。将平行光经过球面透镜/柱面透镜后形成的球面波/柱面波作为探测波前。实验采用商用的微透镜阵列和CCD搭建Shark-Hartmann传感器，利用实际光束作为参考光，避免了参考光的不准直性对实验的影响。模拟计算结果表明平均曲率误差为13.423 mm，实验结果实现了对球面/柱面/倾斜波的探测及复原。
    Abstract: Precise wavefront detection is an important basis for reflection mirror figure test and wavefront distortion measurement. According to the theory of SharkHartmann, the wavefront detecting technique was studied by simulation and experiments. The spherical wave/cylindrical wave, formated by the parallel lights transmitting through the spherical lens/cylindrical lens, were detected as the wavefronts. In experiment the commercial microlens array and charge coupled device (CCD) were utilized to build the Shark-Hartmann sensor, and the actual light beam was used as a reference to avoid the influence of the optical alignment error on system. The simulated calculation results show that the mean curvature error is 13.423 mm, and the experimental results indicate that the spherical/cylindrical/tilt wave detection and recovery can be realized.
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  • 刊出日期:  2014-10-14

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