基于Shark-Hartmann理论的波前探测技术研究

Wavefront detection technology based on Shark-Hartmann theory

摘要: 精确的波前探测是反射镜面型检测及光束波前畸变测量的重要依据，论文根据Shark-Hartmann理论对波前探测技术进行了模拟和实验研究。将平行光经过球面透镜/柱面透镜后形成的球面波/柱面波作为探测波前。实验采用商用的微透镜阵列和CCD搭建Shark-Hartmann传感器，利用实际光束作为参考光，避免了参考光的不准直性对实验的影响。模拟计算结果表明平均曲率误差为13.423 mm，实验结果实现了对球面/柱面/倾斜波的探测及复原。

Abstract: Precise wavefront detection is an important basis for reflection mirror figure test and wavefront distortion measurement. According to the theory of SharkHartmann, the wavefront detecting technique was studied by simulation and experiments. The spherical wave/cylindrical wave, formated by the parallel lights transmitting through the spherical lens/cylindrical lens, were detected as the wavefronts. In experiment the commercial microlens array and charge coupled device (CCD) were utilized to build the Shark-Hartmann sensor, and the actual light beam was used as a reference to avoid the influence of the optical alignment error on system. The simulated calculation results show that the mean curvature error is 13.423 mm, and the experimental results indicate that the spherical/cylindrical/tilt wave detection and recovery can be realized.