铝合金表面的直接光学抛光实验

张艺, 尹自强, 尹国举

张艺, 尹自强, 尹国举. 铝合金表面的直接光学抛光实验[J]. 应用光学, 2014, 35(4): 675-680.
引用本文: 张艺, 尹自强, 尹国举. 铝合金表面的直接光学抛光实验[J]. 应用光学, 2014, 35(4): 675-680.
shu
Zhang Yi, Yin Zi-qiang, Yin Guo-ju. Direct optical polishing research on surface of aluminum alloy[J]. Journal of Applied Optics, 2014, 35(4): 675-680.
Citation: Zhang Yi, Yin Zi-qiang, Yin Guo-ju. Direct optical polishing research on surface of aluminum alloy[J]. Journal of Applied Optics, 2014, 35(4): 675-680.
shu

铝合金表面的直接光学抛光实验

  • 国防科技大学 机电工程与自动化学院 超精密加工技术湖南省重点实验室,湖南 长沙 410073

详细信息
    通讯作者:

    张艺（1989-），男，重庆万州人，硕士研究生，主要从事超精密加工技术和现代光学制造技术方面的研究工作。 Email:251143290@qq.com

  • 中图分类号: TN205;TG580.24

Direct optical polishing research on surface of aluminum alloy

  • Hu-nan Key Laboratory of Ultra-precision Machining Technology,College of Mechatronic Engineering and Automation,National University of Defense Technology,Changsha 410073,China

摘要

    摘要
  • 摘要: 单点金刚石车削铝合金表面具有较好的表面质量和精度，但车削纹路会产生散射现象，难以满足高品质光学系统要求。对铝合金表面进行直接光学抛光可以去掉表面产生的车削纹路，提高反射表面的光学性能，分析酸性条件下和碱性条件下的铝镜抛光原理，采用新型抛光盘与抛光液对单点金刚石车削后铝合金表面进行抛光实验。实验结果表明：通过合理控制工艺参数，能够消除铝合金表面残留的周期性车削刀纹，并且不会产生新的表面划痕，得到较好的铝镜光学表面质量，测得的铝镜表面粗糙度Ra=2.6 nm。
    Abstract: Single point diamond turning can make the surface of the aluminum alloy have good quality and precision, but the left turning grains cause scattering phenomenon that affects the optical effect which hardly meets the requirement of high quality optical system. Direct optical polishing on the surface of the aluminum alloy can remove the turning grains which are caused on the surface and can improve the optical performance of reflecting surface. This experiment adopted the new polishing disk and polishing solution to conduct the polishing test over the surface of the aluminum alloy by single point diamond turning. The result shows that we can remove the periodic turning blade lines remained on the surface of the aluminum alloy through reasonable control of the technological parameter, and by which there is no new superficial scratch, so that we can get better optical superficial quality of the aluminum mirror. The roughness on the surface of the aluminum mirror is 2.6 nm.
    • HTML全文
    • 参考文献(1)
  • [1]Chen Daxiang. Optical processing technique of small-radius cylindrical lens[J]. Journal of Applied Optics, 2012,33(3): 580-583.
    陈大祥. 小半径柱面镜光学加工工艺研究[J]. 应用光学，2012,33(3): 580-583.
    [2]Feller A D, Miller A E. Slurry for chemical mechanical polishing of aluminum: US,20070004209A1[P]. 2007 -01-04.
    [3]Ma Fang, Fu Xiuhua, Jia Zonghe, et al. Processing technology of aspheric silicon lens in IR tracking system[J]. Journal of Applied Optics, 2012,33(4): 784-787.
    马放，付秀华，贾宗合,等. 红外跟踪系统中非球面硅透镜加工技术研究[J]. 应用光学，2012,33(4): 784-787.
    [4]Meng Xiaohui, Zhang Haiying, Li Xinna. Application of research for metal primary mirror of large-aperture infrared solar telescope[J]. SPIE, 2010, 7654：76540M1-76540M6.
    [5]Moeggenborg K, Clark J, Gilliland J, et al. Polishing slurry for aluminum and aluminum alloys: US,20080200098A1[P]. 2008-08-21.
    [6]Lyons J J, Zaniewski J J. High qulity optically polished aluminum mirror and process for producing: US,006966820B1[P].2005-11-22.
    [7]Moeggenborg K J,Vincer T, Lesiak S,et al. Super-polished aluminum mirrors through the application of chemical mechanical polishing techniques[J]. SPIE, 2006, 6288:62880L162880L9.
    [8]Horsta R, Trompa N, De Haana M, et al. Directly polished light weight aluminum mirror[J]. SPIE, 2008, 7018:701808(1)-701808(10).
    [9]Jacquinot E, Letourneau P, Ricoire M. Process for mechanical chemical polshing of layer of aluminum or aluminum alloy conducting material: US,006386950B1[P]. 2002-05-15.
    [10]Chen Jing, Liu Yuling, Wang Lifa，et al. Analysis and study of CMP technology of Al alloy[J]. Micronanoelectronic Technology, 2007,11:1017-1020.
    陈景，刘玉岭，王立发,等. 铝合金CMP技术分析研究[J]. 微纳电子技术，2007，11:1017-1020.
    [11]Peng Jin,Xia Lin,Zou Wenjun. Research status and prospect of chemical mechanical polishing slurry[J]. Surface Technology, 2012,41:95-98.
    彭进，夏琳，邹文俊. 化学机械抛光液的发展现状及研究方向[J]. 表面技术，2012,41:95-98.
    • 相关文章
    • 施引文献
    • 资源附件(0)
计量
  • 文章访问数:  1908
  • HTML全文浏览量:  107
  • PDF下载量:  273
  • 被引次数: 0
出版历程
  • 刊出日期:  2014-07-14

目录

摘要
HTML全文
    参考文献(1)
    相关文章
    施引文献
    资源附件(0)

    /

    返回文章
    返回

    相关数据库

    广告合作

    友情链接

    帮助中心

    扫描关注本刊微信平台

    您是第  2902304位访问者，欢迎！

    地址: 西安市电子三路西段9号 邮政编码: 710065 联系电话: 029-88288172

    版权所有 © 《应用光学》编辑部

    陕公网安备 61011302001501号       陕ICP备19002862号-1

    北京仁和汇智信息技术有限公司 开发  技术支持: info@rhhz.net   百度统计