基于双磨头的磁流变抛光机床与工艺研究

黄文, 张云飞, 郑永成, 罗清, 侯晶, 袁志刚

黄文, 张云飞, 郑永成, 罗清, 侯晶, 袁志刚, . 基于双磨头的磁流变抛光机床与工艺研究[J]. 应用光学, 2014, 35(3): 494-499.
引用本文: 黄文, 张云飞, 郑永成, 罗清, 侯晶, 袁志刚, . 基于双磨头的磁流变抛光机床与工艺研究[J]. 应用光学, 2014, 35(3): 494-499.
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HUANG Wen, ZHANG Yun-fei, ZHENG Yong-cheng, LUO Qing, HOU Jing, YUAN Zhi-gang. Magnetorheological finishing machine and technique based on two-polishing-head[J]. Journal of Applied Optics, 2014, 35(3): 494-499.
Citation: HUANG Wen, ZHANG Yun-fei, ZHENG Yong-cheng, LUO Qing, HOU Jing, YUAN Zhi-gang. Magnetorheological finishing machine and technique based on two-polishing-head[J]. Journal of Applied Optics, 2014, 35(3): 494-499.
shu

基于双磨头的磁流变抛光机床与工艺研究

  • 1.

    中国工程物理研究院 机械制造工艺研究所,四川 绵阳 621900;

  • 2.

    成都精密光学工程研究中心,四川 成都 610041

详细信息
    通讯作者:

    黄文（1973-），男，四川绵阳人，硕士，高级工程师，主要从事超精密研抛技术与装备研究。 Email:huangwen5616@sina.com

  • 中图分类号: TN205；TH161

Magnetorheological finishing machine and technique based on two-polishing-head

  • 1.

    Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;

  • 2.

    Fine Optical Engineering Research Center,Chengdu 610041,China

摘要

    摘要
  • 摘要: 针对传统单磨头磁流变抛光技术的不足，提出了一种新的双磨头磁流变抛光方法，并研制了一台八轴数控双磨头磁流变抛光机，具备了大口径平面、非球面及连续位相板的超精密、高效率加工能力。分别研究了大、小磨头材料去除特性及面形修正能力，不仅获得了稳定、有效的大、小抛光斑，而且获得了超精的大、小平面工艺样件。50 mm小平面经小磨头一次连续抛光，在 45 mm内其面形精度PV由0.21 收敛至0.08 、RMS由0.053 收敛至0.015 ；430 mm430 mm大平面经大磨头3次迭代抛光，在410 mm410 mm内其面形精度PV由0.4 收敛至0.1 、RMS由0.068 收敛至0.013 。由此表明，所研制的双磨头磁流变抛光机床具有较好的材料去除特性和较强的面形修形能力。
    Abstract: Aiming at some deficiencies of traditional one-polishing-head magnetorheological finishing (MRF) technique, a new two-polishing-head MRF method was studied and a two-polishing-head computer controlled MRF machine with 8 axes was developed . The machine has the ability to produce large aperture flat, asphere and continuous phase plate with high figure accuracy and high material removal rate . Material removal characteristic and figure correction ability for each of large and small polishing heads were studied. Each of two heads individually acquired stable and valid polishing removal function and ultraprecision flat sample . After a single polishing iteration using small polishing head , the figure error peak value(PV) in 45 mm diameter of a 50 mm diameter small plano optics significantly improved from 0.21 to 0.08 (0.053 to 0.015 root-mean-square). After three polishing iterations using large polishing head,the figure error in 410 mm410 mm of a 430 mm430 mm large plano optics significantly improved from 0.40 to 0.10 PV (0.068 to 0.013 RMS). These results show that the two-polishing-head MRF machine has good material removal stability and excellent figure correction capability.
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    • 参考文献(1)
  • [1]JACOBS S D, ARRASMITH S A, KOZHINOVA I A, et al.An overview of magnetorheological finishing (MRF) for precision optics manufacturing[C]//101 Annual Meeting of the American Ceramic Society.USA: American Ceramic Society,1999.
    [2]GOLINI D, SCHNEIDER G, FLUG P, et al.Magnetorheological finishing[N].Optics & Photonics News, 2001: 20-24.
    [3]朱海波. 大口径平面光学元件的数控抛光技术研究[D]. 成都: 四川大学, 2005.
    ZHU Hai-bo. Study on computer controlled polishing of the large size plane optical components [D]. Chengdu：Sichuan University, 2005. (in Chinese)
    [4]SHOREY A B,KORDONSKI W, TRICARD M.Magnetorheological finishing of large and lightweight optics[J]. SPIE, 2004,5533:99.
    [5]DUMAS P, GOLINI D, MURPHY P,et al.Improve figure and finish of diamond turned surfaces with magneto-rheological Finishing (MRF)[J].SPIE,2005,5786:296.
    [6]石峰, 戴一帆, 彭小强. 高精度光学表面磁流变修形[J]. 光学精密工程, 2009, 17(8): 1859-1864.
    SHI Feng, DAI Yi-fan, PENG Xiao-qiang . Magnetorheological finishing for high-precision optical surface [J] . Optics and Precision Engineering, 2009, 17（8）:1859-1864 .(in Chinese with an English abstract)
    [7]张云飞, 王洋, 王亚军, 等. 基于最优化思想的磁流变抛光驻留时间算法[J]. 应用光学, 2010, 31(4): 657-662.
    ZHANG Yun-fei, WANG Yang, WANG Ya-jun, et al . Dwell time algorithm based on optimization theory for magnetorheological finishing [J] . Journal of Applied Optics,2010, 31（4）：657-662. (in Chinese with an English abstract)
    [8]杨力. 现代光学制造工程[M]. 北京: 科学出版社, 2009.
    YANG Li . Modern optical manufacturing engineering[M]. Beijing: China Science Publishing House, 2009.
    [9]MENAPACE J A, DIXIT S N, GENIN F Y,et al. Magnetorheological finishing for imprinting continuous phase plate structures onto optical surfaces[J]. SPIE, 2004, 5273: 220-230.
    [10]TRICARD M, DUMAS P, MENAPACE J. Continuous phase plate polishing using magnetorheological finishing[J]. SPIE, 2008, 7062:1-8.
    [11]MENAPACE J A, DAVIS P J, STEELE W A, et al.MRF applications: on the road to making large-aperture ultraviolet laser resistant continuous phase plates for high-power lasers[J].SPIE, 2007, 6403:64030N.
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  • 刊出日期:  2014-05-14

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