激光量热法测量K9基片的表面吸收和体吸收

刘浩; 潘峰; 陈松林; 王震; 马平; 欧阳升; 卫耀伟

激光量热法测量K9基片的表面吸收和体吸收

1.
成都精密光学工程研究中心,四川成都 610041

详细信息

通讯作者:
刘浩（1986-），男，湖北仙桃市人，硕士，主要从事激光薄膜技术研究工作。 Email: liuhaoFOERC@aliyun.com

中图分类号: TN244
计量
- 文章访问数: 2027
- HTML全文浏览量: 108
- PDF下载量: 313
- 被引次数: 0
出版历程
- 刊出日期: 2014-03-15

Measurement for bulk and surface absorptances of K9 substrates with laser calorimeter

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

摘要

摘要: 表面抛光可能给K9基片带来额外的杂质和吸收，分离K9基片的表面吸收率与体吸收率有助于改进基片的加工质量和抛光工艺，对抗损伤能力研究具有重要意义。分析了激光量热法测量弱吸收的原理，采用符合ISO 11551要求的激光量热计测量K9基片的弱吸收。对相同工艺抛光的不同厚度K9基片进行了弱吸收表征，实验发现K9基片的弱吸收随着厚度增加近似线性增大。推导了表面吸收率和体吸收率的计算式，实验得出本样品的表面吸收率为1.2110-5，体吸收率远大于表面吸收率，体吸收系数为1.7210-3/cm。实验结果显示所用K9样品的吸收主要来自于材料本身，改善抛光工艺对降低其吸收率作用不大。
- 激光量热 /
- 弱吸收 /
- 表面吸收 /
- 体吸收 /
- K9基片
Abstract: Absorption might be increased due to the impurities introduced by polishing. To differentiate the surface absorptance and bulk absorptance of K9 substrates is of great importance. It is significant for the research of laser resistance, and helpful for the improvement of producing and polishing technique of K9. In this paper, the principle of laser calorimetry was analyzed, and a laser calorimeter according to ISO 11551 was applied to measure K9 substrates. The weak absorptance of K9 substrates with same polishing technique and different thicknesses was characterized. It is found that the absorptance increases nearly linearly with the increasing of thickness. The equation to calculate the surface and bulk absorptances was analyzed, and the surface absorptance in this experiment was 1.2110-5, while the bulk absorptance coefficient was 1.7210-3/cm which was much greater than the former . The conclusion is made that the K9 absorption is mainly caused by the material itself, and improving polishing technique cannot do much to decrease its absorption.
- laser calorimetry /
- weak absorptance /
- surface absorptance /
- bulk absorptance /
- K9 substrates

HTML全文

参考文献(1)

[1]WU Z L, STOLZ J C, WEAKLEY S C, et al. Damage threshold prediction of hafnia-silica multilayer coatings by nondestructive evaluation of fluence-limiting defects [J]. Appl. Opt., 2001, 40(12): 1897-1906.
[2]MANN K, EVA E, HOPFMULLER A. Damage testing and characterization of dielectric coatings for high power excimer lasers [J]. SPIE,1994, 2253: 731-742.
[3]刘志超, 卫耀伟, 陈松林, 等. ALD氧化铝单层膜1 064 nm激光损伤特性研究 [J]. 应用光学, 2011, 33(2): 373-376.
LIU Zhi-chao, WEI Yao-wei, CHEN Song-lin, et al. Characterization of 1 064 nm laser induced damage in ALD optical film [J]. Journal of Applied Optics, 2011, 33(2): 373-376. (in Chinese with an English abstract)
[4]甘荣兵, 林理彬, 卢勇, 等. UBK7玻璃后表面缺陷诱导体内激光损伤 [J]. 强激光与粒子束, 2001, 13(5): 603-606.
GAN Rong-bing, LIN Li-bin, LU Yong, et al. Laser-induced bulk damage of UBK7 glass owing to its rear-surface defects [J]. High Power Laser and Particle Beams, 2001, 13(5): 603-606. (in Chinese with an English abstract)
[5]庞云霞, 杭凌侠, 陈智利, 等. 基于WLI原理K9基片的亚表面损伤检测 [J]. 应用光学, 2007, 28(6): 773-777.
PANG Yun-xia, HANG Ling-xia, CHEN Zhi-li, et al. Investigation on subsurface damage detection of K9 optics [J]. Journal of Applied Optics, 2007, 28(6): 773-777. (in Chinese with an English abstract)
[6]贾俊, 冯国英, 韩敬华, 等. 激光聚焦位置对K9光学玻璃损伤的影响 [J]. 强激光与粒子束, 2009, 21(2): 208-212.
JIA Jun, FENG Guo-ying, HAN Jing-hua, et al. Influence of laser focusing position on damage of K9 glass [J]. High Power Laser and Particle Beams, 2009, 21(2): 208-212. (in Chinese with an English abstract)
[7]张秋慧, 冯国英, 韩敬华, 等. 多脉冲激光对K9玻璃的表面损伤实验研究 [J]. 强激光与粒子束, 2008, 20(1): 62-66.
ZHANG Qiu-hui, FENG Guo-ying, HAN Jing-hua, et al. Investigation of laser induced damage on K9 glass surface using multi-pulse laser [J]. High Power Laser and Particle Beams, 2008, 20(1): 62-66. (in Chinese with an English abstract)
[8]陈宁, 张清华, 许乔, 等. K9基片的亚表面损伤探测及化学腐蚀处理技术研究 [J]. 强激光与粒子束, 2005, 17(9): 1289-1293.
CHEN Ning, ZHANG Qing-hua, XU Qiao, et al. Studies on subsurface damage detection and wet-etching process of K9 optics [J]. High Power Laser and Particle Beams, 2005, 17(9): 1289-1293. (in Chinese with an English abstract)
[9]王刚, 徐强, 刘洋, 等. 激光辐照引起的材料温度场和热应力场的瞬态分布 [J]. 应用光学, 2011, 32(4): 801-805.
WANG Gang, XU Qiang, LIU Yang, et al. Transient distributions of temperature field and thermal stress field induced by laser irradiation [J]. Journal of Applied Optics, 32(4): 801-805. (in Chinese with an English abstract)
[10]ROSENSTOCK H B, GREGORY D A, HARRINGTON J A. Infrared bulk and surface absorption by nearly transparent crystals [J]. Appl. Opt., 1976, 15(9): 2075-2079.
[11]KLEIN C A, MILLER R P, STIERWALT D L. Surface and bulk absorption characteristics of chemically vapor-deposited zinc selenide in the infrared [J]. Appl. Opt., 1994, 33(19): 4304-4313.
[12]WELSCH E, RISTAU D. Photothermal measurement on optical thin films [J]. Appl. Opt., 1995, 34(31): 7239-7253.
[13]WILLAMOWSKI U, RISTAU D, WELSCH E. Measuring the absolute absorptance of optical laser components [J]. Appl. Opt., 1998, 37(36): 8362-8370.
[14]胡海洋, 范正修, 赵强. 表面热透镜技术探测光学薄膜的微弱吸收 [J]. 光学学报, 2001, 21(2): 150-154.
HU Hai-yang, FAN Zheng-xiu, ZHAO Qiang. Measuring weak absorptance of thin film coatings by surface thermal lensing technique[J]. Acta Optica Sinica, 2001, 21(2): 150-154. (in Chinese with an English abstract)
[15]李斌成, 熊胜明, BLASCHKE H, 等. 激光量热法测量光学薄膜微弱吸收 [J]. 中国激光, 2006, 33(6): 823-826.
LI Bin-cheng, XIONG Sheng-ming, BLASCHKE H, et al. Measuring weak absorptance of optical thin films with laser calorimetric technique [J]. Chinese Journal of Lasers, 2006, 33(6): 823-826. (in Chinese with an English abstract)
[16]唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术 [M]. 杭州: 浙江大学出版社, 2006.
TANG Jin-fa, GU Pei-fu, LIU Xu, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2006. (in Chinese)

施引文献

资源附件(0)

访问统计