飞秒激光湿法刻蚀微纳制造

陈烽; 杨青; 边浩; 杜广庆; 柳克银; 孟祥卫; 邓泽方; 山超

飞秒激光湿法刻蚀微纳制造

1.
西安交通大学电子与信息工程学院,陕西西安 710049

详细信息

通讯作者:
陈烽（1968-），男，陕西西安人，博士，教授，主要从事飞秒激光微纳制造、仿生智能结构与微流控芯片的超精细制备工作。Email:chenfeng@mail.xjtu.edu.cn

中图分类号: TN249
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出版历程
- 刊出日期: 2014-01-15

Micro-nano fabrication of femtosecond laser wet etch

1.
School of Electronic and Information Engineering,Xi-an JiaoTong University,Xi-an 710049,China

摘要

摘要: 飞秒激光微加工作为一种新型微纳制造技术，在复杂三维构型制作方面具有其独特的优势，但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用，提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口，通过调控激光与物质相互作用获得材料的目标靶向改性，进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工，采用这一方法制作出的微透镜尺寸为80 m，球冠高6.7 m，表面粗糙度小于10 nm。利用这种方法，实现了不同结构与特性的高质量微透镜阵列的超精密制备，在石英内部也实现了螺旋微通道的复杂三维结构，螺旋通道直径为20 m，长径比超过100。
- 飞秒激光 /
- 微纳制造 /
- 湿法刻蚀 /
- 微透镜 /
- 微通道
Abstract: In recent years, the femtosecond laser becomes a promising tool to fabricate 3D microstructures for their applications in micro-optics, microfluidics and biofabrication. Various femtosecond-laser-based processes have been used for machining high-precise microstructures with arbitrary shapes. However, the efficiency problem of the femtosecond laser micro-fabrication has hindered its practical applications. Here we present a simple, high-efficient maskless technique to fabricate 3D microstructures on glasses using a femtosecond laser wet etch (FLWE) process. In the FLWE process, the ultrafast laser delivers intensity and time-controlled, programmable arranged, individual pulses to a glass chip. The sample is then subjected to wet-etch processing. The laser pulses change the physical and chemical properties of the glass in the focal spots, and the wet-etch processing that follows carves out a unique 3D microstructures array pattern. Using this method, we fabricated microlens with the diameter: 80 m, height: 6.7 m and surface roughness: less than 10 nm. We fabricated microstructures on glass surface like microlens arrays with different characteristics like high-fill ratio, high-aspect ratio, controllable shape and arrange, and so on. We also fabricated microstructures like spiral microchannels inside glasses using the FLWE process. The diameter of the spiral microchannel is 20 m, and the length-diameter ratio is more than 100. These 3D microchannels will be served as the alternatives of the 2D microstructures in the conventional microfluidic devices.
- femtosecond laser /
- micro- and nano- fabrication /
- wet etch /
- microlens /
- microchannel

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