基于子孔径拼接法测量高精度反射镜

Testing of precise mirror based on subaperture stitching

  • 摘要: 为了解决高精度光学反射镜的子孔径拼接检测问题,基于最小二乘拟合,依据拼接算法建立数学模型,编制了拼接程序,同时对口径为120 mm的平面反射镜进行了拼接检测。检测中,基于标记点确定子孔径间的相对位置,完成子孔径间的对准。分别基于全口径检测结果与自检验子孔径测试结果对拼接结果进行精度分析。实验结果表明:拼接结果无拼痕,拼接结果与全口径测试结果、自检验子孔径测试结果一致; 拼接结果与全口径面形测试的PV值与RMS值的偏差分别为0.020 与0.002 ,验证了检测的可靠性和准确性。

     

    Abstract: In order to solve stitching testing of precise optical flat mirror, based on least squares fitting, we established reasonable stitching algorithms and mathematical models. In addition, relative program was written and a 120 mm precise flat mirror was tested with stitching method. A marked point was used to accomplish the alignments between subspertures. At the same time, relative stitching accuracy was analyzed based on the full aperture testing result and self-examination subaperture testing result. It is proved from the experiment results that there is no gap in the stitching result. The peak value(PV) and root-mean-square(RMS) errors between stitching results and full aperture testing results are 0.020 and 0.002 respectively. The stitching result is in consistent with the full aperture testing result and self-examination testing result, respectively, which proves the reliability and accuracy of the stitching.

     

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