基于子孔径拼接法测量高精度反射镜

郑立功

基于子孔径拼接法测量高精度反射镜

郑立功^,

1.
中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春 130033

详细信息

通讯作者:
郑立功(1969-)，男，吉林长春人，博士，研究员，主要从事先进光学制造技术研究。 Email: ligongz@yahoo.com

中图分类号: TN247; O436.1
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出版历程
- 刊出日期: 2014-01-15

Testing of precise mirror based on subaperture stitching

ZHENG Li-gong^,

1.
Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China

摘要

摘要: 为了解决高精度光学反射镜的子孔径拼接检测问题，基于最小二乘拟合，依据拼接算法建立数学模型，编制了拼接程序，同时对口径为120 mm的平面反射镜进行了拼接检测。检测中，基于标记点确定子孔径间的相对位置，完成子孔径间的对准。分别基于全口径检测结果与自检验子孔径测试结果对拼接结果进行精度分析。实验结果表明：拼接结果无拼痕，拼接结果与全口径测试结果、自检验子孔径测试结果一致; 拼接结果与全口径面形测试的PV值与RMS值的偏差分别为0.020 与0.002 ，验证了检测的可靠性和准确性。
- 光学检测 /
- 干涉测量 /
- 子孔径拼接 /
- 最小二乘拟合
Abstract: In order to solve stitching testing of precise optical flat mirror, based on least squares fitting, we established reasonable stitching algorithms and mathematical models. In addition, relative program was written and a 120 mm precise flat mirror was tested with stitching method. A marked point was used to accomplish the alignments between subspertures. At the same time, relative stitching accuracy was analyzed based on the full aperture testing result and self-examination subaperture testing result. It is proved from the experiment results that there is no gap in the stitching result. The peak value(PV) and root-mean-square(RMS) errors between stitching results and full aperture testing results are 0.020 and 0.002 respectively. The stitching result is in consistent with the full aperture testing result and self-examination testing result, respectively, which proves the reliability and accuracy of the stitching.
- optical testing /
- interferometry /
- sub-aperture stitching /
- least squares fitting

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参考文献(1)

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